Quartz Outer Chamber for Plasma Prep II and Plasma Prep III Systems

Quartz Outer Chamber for Plasma Prep II and Plasma Prep III Systems
Quartz Outer Chamber for Plasma Prep II and Plasma Prep III Systems
$1,847.85
AvailabilityIn Stock
Item11027-AB

Replacement Quartz Outer Chamber
For Plasma Prep III and Plasma Prep II Systems

Quartz chambers are suggested for use with process gasses CF4 and CCl3 and other gasses which could readily react with glass. For process gasses such as O2, N2 and Ar we would recommend our Pyrex Outer Chamber.

For the Plasma Prep II system, both fittings at the rear of the chamber are connected.

For the Plasma Prep III system only the upper fitting is used. The lower one should be capped off.

We suggest also changing the O-ring when getting a new outer chamber.