Quartz Inner Chamber for Plasma Prep II and Plasma Prep III Systems
Replacement Quartz Inner Chamber
For Plasma Prep III and Plasma Prep II Systems
Inner chamber size: 4” diameter and 5.75”, nominal.
Quartz chambers are suggested for use with process gasses CF4 and CCl3 and other gasses which could readily react with glass. For process gasses such as O2, N2 and Ar we would recommend our Pyrex Inner Chamber.
We suggest also changing the O-ring when getting a new inner chamber.