Pyrex Outer Chamber for Plasma Prep II and Plasma Prep III Systems
Replacement Pyrex Outer Chamber
For Plasma Prep III and Plasma Prep II Systems
Pyrex chambers are suggested for use with process gasses O2, N2, Ar and other gasses which do not readily react with glass. For process gasses such as CF4 and CCl3 we would recommend our Quartz Outer Chamber.
For the Plasma Prep II system, both fittings at the rear of the chamber are connected.
For the Plasma Prep III system only the upper fitting is used. The lower one should be capped off.
We suggest also changing the O-ring when getting a new outer chamber.