Manipulator Modules 

 

Manipulator Modules 

Testing platforms for semiconductor and other electrical testing. As indispensable for quality control as it is for research. Such tools require the highest mechanical precision.

 

 

 

Prober Modules

•    Electrical measurements on IC structures, potential contrast, detection of defects.
•    Positioning accuracy of 1μm under visual control.
•    Built-in piezo translators increase positioning accuracy to 10 nm.
•    Optional: high or low temperature experiments.

    

 Lift-out-Tools  

•    Allows positioning and placement of a needle on a specimen surface in SEM. 
•    Three orthogonal directions of motion for the needle (xyz) and axial rotation.
•    Multiple samples can be loaded.
•    Optional heating/cooling unit.

 

Tables 

•    Microscope Table: Allows rotation by 360°, tilting by up to 90° and linear movement by up to 30 mm.
•    Prober Table with piezo drive: High-precision positioning and positioning resolution.
•    Piezo Table K&W: Enables precise traversing and positioning.
•    Piezo Table: XY module suitable for positioning components or specimens