SPI Supplies Shelf for PPIII Solid State Etcher
SPI Supplies Quartz Shelf for PPIII Solid State Etcher
The shelf provides a convenient surface for your sample placement, having a number of holes to aid in gas flow. The shelf brings samples up to mid height and provides a smooth flat surface. (4"x6").
The Pyrex shelf should not be used in gas environments that produce fluorine radicals (CF4, CHF3, etc). For those gasses, use the quartz shelf (11009Q-SHELF-AB).
The Quartz shelf is suggested for use in environments that produce fluorine radicals (CF4, CHF3, etc). For other gasses, the Pyrex shelf (11009-SHELF-AB) may be more appropiate.