KARMEN™ BSE Detector with Cooled Stage

KARMEN™ BSE Detector with Cooled Stage
KARMEN™ BSE Detector with Cooled Stage
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Retractable BSE detector for SEM for hot stage samples


Reliable Sensor

  • Single crystal sensor
  • Scintillator/PMT principle for ultimate image quality
  • Excellent S/N ratio
  • Unlimited sensor lifetime
  • HV + LV + ESEM operation
  • Sample temperature over 1000°C

Precise Mechanics

  • Motorized retraction mechanism
  • Bellows-sealed high vacuum system
  • Retraction 140 mm
  • Compact design
  • Precise alignment
  • Customized connection to SEM

The KARMEN BSE detector is a scintillator based detection unit for scattered electrons which includes YAG:Ce scintillator and light-guide (Sensor Unit ), vacuum optical feed-through, bellows based vacuum retraction mechanism (Mechanical Unit ), photomultiplier (PMT) and Electronics Control Unit .

The scintillator is a YAG:Ce single crystal with a conductive ITO coating. The scintillating light is detected by the PMT module.

The retractable vacuum mechanics is motorized.



  • Single crystal scintillator with optimized efficiency and minimized afterglow, exponential decay time 45 ns with 30 photons/keV
  • Outer diameter 15 mm
  • Inner hole diameter 3 / 2 / 1.5 or 1 mm. This dimension limits the field of view
  • Exclusive CRYTUR LOW-ENERGY COATING™ sensitive down to 0.2 keV
  • Sensitivity down to 10pA beam current
  • Allows a 7 mm working distance





  • Dimensions 406 x 100 x 72 mm
  • Bellows design for ultimate vacuum
  • 140 mm motorized retraction
  • +/- 2 mm fine adjustment in x, y, z axis
    • mm repeatability
  • Flange adapted to customer's SEM
  • Silver / black / blue / red matt surface finish available





  • Dimensions 270 x 180 x 65 mm
  • Supply 230/110 V
  • 3 noise filters optimized for different scanning speeds
  • 50 MHz bandwidth
  • Internal source 0-1200 V for PMT HV
  • Output video signal -1/+1V (-5/+5V)
  • Full remote software control
  • DC offset up to -20V


The KARMEN - retractable BSE detector for hot stage is an after market product designed to fit on most SEM Systems. Information on the SEM Model, stage, ports available, and other detectors will be needed as part of the final build.