SPI Supplies Brand Wafers, Si3N4 100 nm Coated Both Sides, 200µm Thick Wafers, 100 mm Pk of 5
Refractive index (RI) values of the nitride membrane:
Our target is for an RI of approximately 2.15. We do not guarantee this RI, because in most instances, refractive index has no real significance anyhow. But if you believe you require tighter control over RI, we can of course exert better control, but it will require a substantially larger minimum purchase and also, as a result of the tighter controls, it will require a higher pricing level as well.
Available silicon nitride coating thickness: 100 nm
Coated both sides
Wafer diameter: 100 mm
Wafer thickness: 200 µm
For some time, SPI Supplies has been offering to researchers silicon nitride TEM membrane window grids, membrane windows for x-ray microscopy and other applications and also our multi-frame arrays for spin coating.
More recently, because of the unsurpassed quality of the low stress nitride coatings, we were the first and so far to our knowledge, the only ones to successfully produce a perforated silicon nitride membrane window for TEM applications.
A growing number of researchers wanting to do their own experiments with MEMS techniques have been asking us to supply them with our coated both sides silicon nitride coated wafers. We have hesitated to do that until now because of the logistics needed to make sure the wafers arrived undamaged and at the same time, were maintained in their original clean room environment until opened in the clean room of the final customer.
We will be eventually adding all nitride coating thicknesses seen on the above referenced webpages featuring our different membrane window products. If you don't see what you require listed, let us know and we will offer you pricing. Howvever under no circumstances will we offer fewer than five wafers. Remember that these are our standard wafers, which are all 200 µm thick, 100 mm (e.g. 4") wafers, 100 nm nitride coated both sides, polished both sides.