150-2DUTC mounted on FEI/Leica/LEO/Cambridge/Philips Pin-Type Mount 25.4 tableX3.2 dia.X7.5mm length
General Purpose - High Precision
A precision, holographic pattern providing accurate calibration in the horizontal plane for very high resolution, nanometer-scale measurements.
Period: 144 nm pitch, two-dimensional array. Accurate to +/- 1 nm. Refer to calibration certificate for actual pitch.
Surface: Aluminum bumps on Silicon, 4x3 mm die. Bump height (about 90 nm) and width (about 75 nm) are not calibrated.