150-2DUTC mounted on Topcon 15 mm round mounts, 10 mm high
General Purpose - High Precision
A precision, holographic pattern providing accurate calibration in the horizontal plane for very high resolution, nanometer-scale measurements.
Period: 144 nm pitch, two-dimensional array. Accurate to +/- 1 nm. Refer to calibration certificate for actual pitch.
Surface: Aluminum bumps on Silicon, 4x3 mm die. Bump height (about 90 nm) and width (about 75 nm) are not calibrated.