For General Purpose Microscopes
A precision pattern for calibrating a microscope’s horizontal plane for nanometer-scale and micrometer-scale measurements.
Period: 297 nm pitch, two-dimensional array. Refer to calibration certificate for actual pitch.
Surface: Aluminum bumps on Silicon, 4x3 mm die. Bump height (about 100 nm) is not calibrated.
For AFM, use in contact, intermittent contact (TappingModeTM ) and other modes with image sizes from 500 nm to 10 µm. Available unmounted or mounted on steel disks.
For SEM, this specimen works well at a wide range of accelerating voltages and calibrates images from 5 kX to 100 kX. Normally supplied unmounted. Can be mounted on a stub of your choice (additional cost).
Usability: the calibrated pattern covers the entire 4x3 mm die. There is sufficient usable area to make thousands of measurements without reusing any areas altered or contaminated by previous scans.
Model 300-2D. This Calibration Reference specimen comes with a non-traceable, manufacturer’s certificate. This states the average period, based on batch measurements. Average pitch is accurate to +/- 1 nm.