Recalibration and cleaning: X, Y, and Z.
This highly innovative and useful and unique product is a magnification calibration standard for ISO-9000 certification procedures. This one standard addresses magnification calibration for light microscopy (transmitted & vertical illumination), confocal microscopy, SEM (backscattered & secondary) and even TEM (using a bulk holder for secondary electron imaging)! This NIST traceable stage micrometer standard has a useful range for horizontal and vertical axes at any magnification from 10X to 50,000X. Can also be used for particle size counting calibration and resolution testing.
Size: approximately 9 X 9 X 2.0 mm
Construction: fused silica base with coating of ITO (optically transparent and electrically conductive (100nm) and anti-reflective chromium (100nm) to form the pattern. Retainers are available for ease of handling and protecting the MRS-3. Specify your make and model of microscope. The most common retainer (SEM/R) is 1" OD X 1/8" thick. It has a hole in the center for transmitted optical illumination.
Retainers are available and highly recommended for ease of handling and protecting the MRS-3. Specify your make and model of microscope. The most common retainer (SEM/R) is 1" OD X 1/8" thick. It has a hole in the center for transmitted optical illumination. It is designed specifically for any SEM stage capable of taking a one inch metallographic mount.
The step height is 100 nm in the vertical direction. The z-calibration is not useful for light microscopy or SEM but can be very useful for confocal and any type of profilometry.
Classification of the different product forms:
The MRS-3 is available in three different forms:
Just the basic product, as described but without any calibrations or certification. This is SPI# 02766-AB. Or as described above but with complete calibration and certification in the X and Y directions (but not the z direction). This is SPI# 02767-AB.
Or as described above but with complete calibration and certification, not just in X and Y but also the Z direction. This is SPI# 02768-AB
Range of use:
The MRS-3 allows calibration of magnifications from about 10X to 50,000X. The maximum dimension is 8.000 +/- .00025 mm in the X and Y dimensions. The smallest dimension is a pitch of 2µm (1µm bar + 1µm space). The three images below were taken with a scanning electron microscope in the backscattered electron mode. They represent only a small part of the patterns available in the MRS-3.