DENKA M-3 LaB6 Filaments/Cathodes (Lanthanum Hexaboride)

The Denka M-3 LaB6 filaments are the industry standard, high-quality LaB6 cathodes. The standard Denka M-3 LaB6 cathode includes a 90° tip angle and a 15µm round tip; this provides a high brightness source coupled with excellent stability.

Denka uses the purest, highest quality LaB6 crystals for the Denka M-3 LaB6 cathodes. The Denka LaB6 tip provides a 10x higher brightness than the standard tungsten source, resulting in better resolution with clear images and less noise. The lifetime of the LaB6 cathode is much longer than a tungsten source providing a stable source over a longer period.

 

The Denka LaB6 cathodes improve results when used for:

  • SEM for low voltage and long term EDS mapping applications
  • TEM imaging and analysis
  • Electron probe microanalyzers (EPMA or Microprobe)
  • E-beam lithography

The LaB6 sources require a higher vacuum than standard tungsten sources which generally requires an additional ion-getter pump at the electron source. The required vacuum is in the 10-7 mbar range.

 

Design and features of the Denka M-3 LaB6 EM cathodes: 

The Denka LaB6 EM cathode construction is similar to the tungsten cathodes. It uses the same base with tungsten wires attached to the contact pins. Instead of a full tungsten loop, the LaB6 crystal forms the tip with the tungsten wires cemented against the LaB6 crystal. In this design, the LaB6 crystal is directly heated by the filament current through the tungsten wires and the LaB6 crystal. This unique construction has a number of features and benefits:

  • Interchangeability: Denka M-3 LaB6 cathodes are designed as a direct replacement for tungsten filaments
  • Suitable for SEM and TEM
  • Direct heating design with tungsten wired cemented at the high purity LaB6 crystal
  • High brightness; about 10x higher than tungsten filaments (even 20x for the sharper tips)
  • Stable sources; due to its durable and simple construction, the standard Denka M3 LaB6 comprises stability of better than 3%/hour at 1550°C
  • Long life; at 10-7mbar vacuum and 1550°C operating temperature, 500-2000 hours lifetime can be expected for the standard M3 LaB6 cathode
  • Low vapor pressure; reduced evaporation loss
  • High melting point and stability at operating temperatures
  • Low work function of 2.66ev (compared to 4.7ev for tungsten)
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TYPE   STANDARD TIP
Tip Shape 90°cone angle with 15 µm round tip
Brightness 10x times than tungsten tip
Value 1 x 106 A/cm2.Str
Saturation Mono spot at around 1500°C
Crossover Small; 7-10µm
Angular Distribution Sharp; 1.6 x 10-2 rad 
Lifetime Approx. 500 - 2000 Hrs
Ease of Operation Moderate
Stability High, better than 3%/hr
Vacuum 10-7 mbar or better
Work Function 2.66 ev