SEMPrep2 SC-2000 (SEM)
SEMPrep2 SC-2000 (SEM)
Click to enlarge

SEMPrep2 SC-2000 (SEM)

The SEMPrep2 is equipped both with high- and low-energy ion sources. Rapid slope cutting with the high-energy ion gun followed by gentle surface cleaning with the low-energy ion gun provides cross-sectional SEM samples suitable for semiconductor failure analysis and other analytical purposes. The system also provides an ion milling based solution for improving and cleaning of mechanically polished SEM samples and preparation of damage-free surfaces for EBSD technique.

  • Cross-sectional sample preparation by slope cutting
  • Final polishing and cleaning of traditional SEM and EBSD samples
  • High-energy ion gun for rapid milling
  • Low-energy ion gun for gentle surface polishing and cleaning
  • Automated parameter settings and operation
  • Sample rotation and oscillation
  • Site-specific sample preparation with high-precision positioning
  • Real-time monitoring of the milling process by high resolution CCD camera and TFT monitor