Model 292UTC Magnification Standard, 292nm Pitch, Traceable, AMRAY Pin-Mount
Model 292UTC, High Magnification, High Resolution Calibration Reference and Traceable Standard.
Disciplines: AFM, SEM, Auger and FIB
Period: 292 nm pitch, one-dimensional grating. Accurate to +/- 1% (3 standard deviations).
Line height: approximately 30 nm (not calibrated).
Line width: Approximately 130 nm (not calibrated).
Surface: Titanium lines on Silicon wafer, 3 x 4mm.
A precision, holographic pattern featuring high accuracy, usability and stability. Its moderate ridge height makes it convenient for AFM. This specimen provides high contrast and excellent edge definition. It provides accurate calibration for high resolution, nanometer-scale measurements. The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans.
AFM: use in contact, intermittent contact (TappingModeTM ) and other modes with image sizes from 500 nm to 20 mm.
SEM: Suitable with beam voltages from under 1 kV to 30 kV. Useful from 5,000x to over 200,000x. Excellent contrast in back-scatter as well as secondary electron imaging.
Auger and Focused Ion Beam (FIB): use similar conditions as for SEM. Available unmounted to accommodate all SEM stages. For AFM, available unmounted or mounted on 12 mm steel disks.
Model 292UTC is a traceable, certified standard from a select grade. Each sample is individually measured in comparison with a similar specimen calibrated at the PTB. (This is the Physikalisch-Technischen Bundesanstalt. As the "national standards laboratory of Germany", it is the German counterpart to NIST in the USA.) The uncertainties are typically better then: +/- 2NM (average period) and +/- 2NM (single pitch value), where each range approximates a 95% confidences interval. See certificate of traceable calibration for details.