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SPI Supplies Shelf for PPIII Solid State Etcher
SPI Supplies Shelf for PPIII Solid State Etcher
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SPI Supplies Shelf for PPIII Solid State Etcher

Material Options for SPI Supplies Shelf for PPIII Solid State Etcher
Material Quartz
Item Number 11009Q-SHELF-AB
Availability In Stock
Price  $511.45
Material Pyrex
Item Number 11009-SHELF-AB
Availability In Stock
Price  $265.61

The shelf provides a convenient surface for your sample placement, having a number of holes to aid in gas flow. The shelf brings samples up to mid height and provides a smooth flat surface. (4"x6").

The Pyrex shelf should not be used in gas environments that produce fluorine radicals (CF4, CHF3, etc). For those gasses, use the quartz shelf (11009Q-SHELF-AB).

The Quartz shelf is suggested for use in environments that produce fluorine radicals (CF4, CHF3, etc). For other gasses, the Pyrex shelf (11009-SHELF-AB) may be more appropiate.