SPI Supplies Holey Carbon Coated onto Copper 1000um Aperture Grids Pack of 25 with SPI Grid Box
The filmed coatings will be as described, but note that what we have described as "Silicon Dioxide (SiO2)/Monoxide (SiO)" is the result of an evaporation of SiO (silicon monoxide) at high vacuum and the end result is generally thought to be a combination of SiO2 and SiO. In any case, for nearly all users of this product, what seems to be important is not knowing the precise composition, but knowing that in a plasma etcher, oxygen will not etch or otherwise harm the film.