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SPI Module Sputter Coater with Quartz Crystal Thickness Monitor and Pump 220v 50/60 Hz CE Certified
SPI Module Sputter Coater with Quartz Crystal Thickness Monitor and Pump 220v 50/60 Hz CE Certified
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SPI Module Sputter Coater with Quartz Crystal Thickness Monitor and Pump 220v 50/60 Hz CE Certified

Item Number 12150Q-AX
Availability Contact for Availability
Price  $11,761.20

SPI Module™ Sputter Coater with Quartz Crystal Thickness Monitor and Pump 220v 50/60 Hz CE Certified:
With External Pump

Vacuum Base and Sputter Coater Module plus an external 2.9m3/h pump, DUO 3 made by Pfeiffer Vacuum, Inc. For installation in a room without outside exhaust we recommend the purchase of an oil mist filter. And for the optimum performance, we recommend the purchase of a foreline trap.

RoHS Compliance

Take two instruments that deposit two different kinds of conductive coatings onto SEM samples and tie them together with a common power/vacuum control base unit. What do you get?

Sputter/Carbon Coating the SPI-Module Way!

  • Increased cost efficiency, a sputter coater and carbon coater wrapped into one!.
  • Significant savings on the total system.
  • Significant savings in usable bench space.
  • Easily upgraded for extra capabilities.
  • Cool sputter coating of precious metals - with magnetically enhanced cathode design.
  • Fast coating (up to 200A gold in 20 seconds) - virtually no heat damage to sensitive samples.
  • Specimen chamber: 5" (12.7 cm) High x 4" (10.2 cm) Outside Diameter
  • Uniform coating - all shapes, sizes. Thickness monitor generally not needed.
  • Safety interlocks - ensures that high voltage is not applied until vacuum is achieved.
  • Continuously movable sample stage - to easily adjust cathode to sample distance.
  • Economical operation - low metal consumption.
  • Mobility - compact design allows easy transport from lab to lab.
  • Finger bleed vacuum control - with the highest quality needle valve.
  • Inert gas entry - inlet in rear.
  • Water cooling to sample stage - standard.
  • Quick-change cathode assembly - for maximum throughput and minimum sample to sample cycle time.
  • One year warranty.
  • CE Certified
  • RoHS Compliant