This carefully made specimen was designed for resolution testing in the SEM
equipped with tungsten, Lab6 or field emission gun (e.g. FEG)
emitters. Like the highly used and popular
SPI Gold- on-Carbon Resolution Test Sample,
the "test" is to image the individual particles of metal against the carbon
background and visually determine the minimum particle spacing at which the
gap between particles can be clearly determined. The individual particles
are nominally 30 nm in diameter, an ideal dimension for astigmatism
correction in the SEM. The tin on carbon specimen is also an excellent image
performance checker for operating in the
backscattered electron (BSE)
detection mode.
One note of caution:
This specimen is, quite frankly, more difficult to use
than the gold-on-carbon sample, and we only suggest it for those
laboratories where gold is forbidden, such as many laboratories in the
semiconductor industry using CD-SEMs.
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