Description of the Mag*I*Cal Calibration Sample
The sample itself is an ion milled cross-section of a single crystal of
silicon. In this single crystal are a series of atomically flat layers
of Si and SiGe. They have been produced to electronic device quality by
molecular beam epitaxy (MBE). The thickness and spacing of these layers are
very accurately known, since they have been directly referenced to the (111)
crystal lattice spacings of silicon, which are readily visible right on the
sample.
The layer spacings are designed so that the
sample can be used to calibrate the entire magnification range in a TEM,
from about 1000X up to 1,000,000X. No other sample in the world can cover
this broad of a range of magnifications! Since the sample itself is a
single crystal, it can also be used to perform the camera constant
calibration and also the image-diffraction pattern rotation calibration.
Thickness of the Mag*I*Cal Calibration Sample
The thickness of the sample varies from about 10 nm at the edge of the
perforation (the thinnest regions closest to the perforation contain too
much amorphized material at both surfaces to be useful) to about 50 µm at
the very edge of the grid. The useful area for TEM purposes depends on the
TEM accelerating voltage, but generally thicknesses of up to 1 µm are usable
in all modern TEMs. The "thickening" rate varies with each sample, but the
angle of the sample material near the perforation is about 10° or less (for
example, for 10°, the sample would be about 1 µm thick at a position about 5
µm in from the perforation).
If after reading a more extensive description of the product, and you
still have questions, let us know and we will try our best to answer them. If one is
using an x-ray spot, and if the spot size is about 5 µm diameter,
and the spot was positioned in the thinnest region of the sample, the
average thickness will be 2.5 µm, but would vary across the sample from 0 to 5 µm thickness.
And of course, the sample comes with simple, easy to
follow instructions for all calibrations.
|

Figure 2
|