SPI Replacement Sputter Coater Cathodes
Installation instructions
For those sputter coaters achieve cathode attachment via the glueing of the
cathode to the sputter head, following these easy instructions will result in
long life and good performance of the cathode:
1. Remove any remains of the previous cathode by first soaking in acetone
for one hour to "soften" the previously used epoxy and then, while wearing
appropriate eye protection, and using a
single edged GEM razor blade, carefully slip the blade in between the
spent cathode and sputter head.
2. Save the spent cathode for return to SPI on the occasion of the next
purchase of a replacement cathode and participate in our
cathode recycling program
and thereby qualify for a substantial discount on the purchase of your next
cathode. Precious metals are non-renewable resources and we all have a
societal obligation to recycle when possible and not squander a limited
resource.
3. If there are still areas of the head that contain adhering epoxy, use
fine sandpaper to "sand" away the last vestigages of such adhering material.
4. Do a final wash with acetone
being sure to allow to dry before taking the next step.
5. Open the polybag containing the
SPI # 05067-AB Silver Epoxy Kit, follow the mixing instructions, and
apply a thin layer of the now mixed and curing silver epoxy to the sputter
head surface.
6. Give the new cathode a final "wiping" with a
lint-free cotton wiper and then carefully place the cathode onto the now
curing silver epoxy layer.
7. Turn upside down and then place some weight on top of the head, in order
for there to be uniform pressure across the cathode/sputter head interface.
8. Allow 24 hours for full cure before installing in the sputter coater and
using to coat samples.
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Wednesday March 10, 2010
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