SPI Supplies Division
Section 01: Identification
Date Effective... January 8, 2009
(most recent revision)
Chemical Name/Synonyms... Silicon chips with membrane
Chemical Family.......... Metal
Emergencies
Use Only #'s:
Contacting CHEMTREC 24 Hour Emergency
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Toll-free phone : 1-(800)-424-9300 USA only
Product or Trade Name.... SPI Supplies® Brand Silicon Nitride Membrane
Windows on Silicon Frames
CAS #.................... 7440-21-3 9 (for silicon)
Chemical Formula......... Si
NFPA (National Fire Protection Association)
Rating (Scale 0-4): Not applicable
Component CAS # EINECS # Appr % ___________________________________________________________________ Silicon 7440-21-3 231-130-8 < 99.9% Silicon nitride 12033-89-5 > 0.1%
Emergency Overview: In the as-received form, virtually nothing is present in the form of dust since it is manufactured under clean room conditions. However, if this material is ground down into a dust, then the dust can be irritating. However in the normal use of this product, it is not anticipated that one would be doing any mechanical processing. Physical state: Silver-gray "wafer" color Potential health effects (overview): Eyes: May cause eye irritation but one is not normally bringing this material in this form in contact with the eye. Skin: May cause skin irritation but one is not normally bringing this material in this form in contact with skin. Ingestion: Very unlikely that these materials could ever be swallowed. However, we do not know what effects it could have on either the digestive track or other parts of the digestive system. The sharp corners on the materials could cause internal bleeding. Inhalation: If the material is heated, any vapors coming from it should not be inhaled. We don't know what would be the composition of such vapors. If the material is heated within an electron microscope for in situ experiments, then any vapors generated would be pumped out by the vacuum system and ultimately exhausted to the environment. Chronic: Not known
Over view: It is highly unlikely that one could expose themselves to this material in a way that would ever require first aid, assuming the product was used as intended. First Aid for Eyes: Flush eyes with plenty of water for at least 15 minutes, occasionally lifting the upper and lower eyelids. Get medical aid. First Aid for Skin: Flush skin with soapy water for at least 15 minutes. Remove contaminated clothing including shoes. Get medical attention if irritation develops. Be sure to wash clothing before use. First Aid for Inhalation: Remove from exposure to fresh air immediately. If not breathing, give artificial respiration. If breathing is difficult, give oxygen. Get medical aid if cough or other symptoms appear.
General Information: As in any fire, wear a self-contained breathing apparatus, MSHA/NIOSH (approved or equivalent), and full protective gear. Dusts at sufficient concentrations can form explosive mixtures with air. Dousing metallic fires with water may generate hydrogen gas, an extremely dangerous explosion hazard. The small nature of these materials is such that any fire should be treated for the surrounding contents, not the silicon membrane window grids.
Overview:
Use proper personal protective equipment as indicated in Section 8.
Spills/Leaks:
Situation not applicable.
Handling: Handle with high precision tweezers and not with the fingers. Storage: If TEM grids, store in a Twist-A-Grid™ or Slide-A-Grid™ grid storage box. Store in a cool, dry, well-ventilated area away from incompatible substances. Store protected from moisture.
Engineering Controls:
None required if products is being used as intended.
Personal Protective Equipment:
Eyes: Wear appropriate protective eyeglasses or chemical safety goggles
as described by OSHA's eye and face protection regulations in 29 CFR 1910.133
or European Standard EN166. This is recommended for any laboratory procedure
and eye protection is more needed to protect against dangers from using the sharp
precision tweezers than the silicon membrane products themselves.
Skin: Not necessary to protect skin when handling these materials with tweezers.
Clothing: Not necessary when working with these membrane window grids.
Respirators: A NIOSH/MSHA approved air purifying dust or mist
respirator or European Standard EN 149.
Physical State: Solid Appearance: Silver-gray Odor: None pH: Not applicable. Vapor Pressure: Nil Vapor Density: Not applicable Evaporation Rate: Does not evaporate at room temperature Viscosity: Not applicable Boiling Point: 2355°C Freezing/Melting Point: 1410°C Autoignition Temperature: Not applicable. Flash Point: Not applicable. Explosion Limits, lower: Not available. Explosion Limits, upper: Not available. Decomposition Temperature: Not available. Solubility: Insoluble in water. Specific Gravity/Density: Not available. Molecular Formula: Si Molecular Weight: 28.0856
Chemical Stability:
Stable under normal temperatures and pressures.
Conditions to Avoid:
Incompatible materials, dust generation, moisture, excess heat
(without proper protection as in situ experiments in a TEM).
Incompatibilities with Other Materials:
Moisture, strong oxidizing agents.
Hazardous Decomposition Products:
Irritating and toxic fumes and gases, oxides of silicon.
Hazardous Polymerization:
Has not been reported.
RTECS#: VW0400000
CAS#: 7440-21-3
LD50/LC50:
CAS# 7440-21-3:
Draize test, rabbit, eye: 3 mg Mild; Oral, rat: LD50 = 3160 mg/kg.
Carcinogenicity:
IARC: Group 3 carcinogen (listed as undefined).
Epidemiology:
IARC has concluded there is inadequate evidence to describe amorphous silica
as carcinogenic in animals or in humans. Crystalline silica has been designated
as a probable human carcinogen. However these materials are made of silicon and
under normal use, would not be exposed to conditions where the silicon would be
converted to silica of any form.
Teratogenicity:
No information available.
Reproductive Effects:
No information available.
Neurotoxicity:
No information available.
Mutagenicity:
No information available.
Other Studies:
No information available.
Environmental: When used as intended, its disposal would be determined by what samples were being analyzed and the MSDS for those other materials should guide the disposal procedures. If the materials are used strictly as x-ray windows with contact with other materials, they can be disposed of as an inert material. No adverse environmental effects are foreseen. Mobility: Non-volatile/Insoluble in water. Degradability: Not biodegradeable
Dispose of in a manner consistent with federal, state, and local regulations
DOT Shipping Name: Not regulated DOT Hazard Class: None Product RQ: None Technical Shipping Name: Metal alloy UN or NA number: None
United States of America:
TSCA
CAS# 7440-21-3 is listed on the TSCA inventory.
This material does not contain any Class 2 Ozone depletors.
Clean Water Act:
None of the chemicals in this product are listed as Hazardous
Substances under the CWA.
None of the chemicals in this product are listed as Priority
Pollutants under the CWA.
None of the chemicals in this product are listed as Toxic
Pollutants under the CWA.
OSHA:
None of the chemicals in this product are considered highly
hazardous by OSHA.
Individual states of the USA:
Silicon can be found on the following state right to know lists:
California, (listed as "no name"), New Jersey, Florida, (listed
as "no name"), Pennsylvania, Minnesota, Massachusetts.
California No Significant Risk Level:
None of the chemicals in this product are listed.
European/International Regulations
European Labeling in Accordance with EC Directives
Hazard Symbols: Not available.
Risk Phrases:
Safety Phrases: WGK (Water Danger/Protection)
CAS# 7440-21-3: No information available.
United Kingdom Occupational Exposure Limits
CAS# 7440-21-3: OES-United Kingdom, TWA total inhalable dust:
10mg/m3 TWA; respirable dust: 4 mg/m3 TWA
Canada
CAS# 7440-21-3 is listed on Canada's DSL List.
CAS# 7440-21-3 is not listed on Canada's Ingredient Disclosure List.
Exposure Limits in Other Countries
CAS# 7440-21-3:
OEL-AUSTRALIA:TWA 10 mg/m3
OEL-BELGIUM:TWA 10 mg/m3
OEL-DENMARK:TWA 10 mg/m3
OEL-FRANCE:TWA 10 mg/m3
OEL-THE NETHERLANDS:TWA 10 mg/m3
OEL-SWITZERLAND:TWA 4 mg/m3
OEL-UNITED KINGDOM:TWA 10 mg/m3 (total dust) JAN9
OEL-UNITED KINGDOM:TWA 5 mg/m3 (resp. dust)
OEL IN BULGARIA, COLOMBIA, JORDAN, KOREA check ACGIH TLV
OEL IN NEW ZEALAND, SINGAPORE, VIETNAM check ACGI TLV
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