
Date Effective.......... January 8, 2009
(most recent revision)
Chemical Name/Synonyms... Hexamethyldisilazane;
Bis(trimethylsilyl)amine; HMDS; 1,1,1,3,3,3-Hexamethyldisilazane
Emergencies
Contacting CHEMTREC:
24 Hour Emergency Use Only #'s...
Worldwide phone: 1-(703)-527-3887
Worldwide FAX: 1-(703)-741-6090
Toll-free phone: 1-(800)-424-9300 USA only
Product or Trade Name...SPI-Chem™ Hexamethyldisilazane
Synonyms................Bis(trimethylsilyl)amine; HMDS;
1,1,1,3,3,3-Hexamethyldisilazane
| Hazardous
Material Information System USA | Health | 3 | National Fire Protection Association USA | ![]() |
| Fire Hazard | 4 | |||
| Reactivity | 1 | |||
| Personal Protection |
Component Name CAS # Percent EINECS/ELINCS Hexamethyldisilazane 999-97-3 >95% 213-668-5
Emergency overview: Appearance: Clear, colorless liquid Flash Point: 14° C (57° F) Cleveland Open Cup Warning! Hexamethyldisilazane has an exceptional tendency to accumulate static charge. Human fatality has been reported from fires ignited by static discharge of hexamethyldisilazane. All equipment involved in liquid transfer MUST be grounded to dissipate static charge. Target Organs: Central nervous system Potential Health Effects Hexamethyldisilazane reacts with moisture in living tissue to generate ammonia. Eye: Causes eye burns. Vapors may cause immediate or delayed severe eye irritation. Eye contact with the liquid will cause severe conjunctivitis and corneal damage. Skin: Causes skin burns. Toxic in contact with the skin. May produce irritation or contact dermatitis, which may be delayed by several hours. After skin contact, immediately wash with plenty of soap and water; continue flushing with water for 15 minutes. Ingestion: May be harmful if swallowed. May cause severe gastrointestinal tract irritation with nausea, vomiting, and tissue burns possible. Inhalation: Inhalation of particulates or vapor will cause irritation of the respiratory system. Symptoms include burning pain in nose and throat, coughing, wheezing, shortness of breath, pulmonary edema, headache, nausea. Inhalation may be fatal due to edema of the bronchi and larynx, chemical pneumonitis, pulmonary edema. Chronic: None known.
Eyes: Immediately flush with copious amounts of water for at least 15 minutes, holding the eyelids open. Seek medical attention. Skin: Flush with water, then wash with plenty of soap and water. Continue flushing with water for at least 15 minutes. Remove contaminated clothing and wash before reuse. Seek medical attention. Ingestion: Do not induce vomiting. If person is conscious and alert, wash out mouth with water. Never give fluids or induce vomiting if person is unconscious or having convulsions. Seek immediate medical attention. Inhalation: If inhaled, remove to fresh air and seek medical attention immediately. If breathing is difficult, give oxygen. If breathing stops, give artificial respiration. Notes to Physician: Treat symptomatically and supportively.
General Information: Vapor may travel back a considerable distance to a source of ignition and flash back. Containers may explode under fire conditions. Flammable liquid. Emits toxic fumes under fire conditions. Flash Point: 14°C (57°F) Cleveland Open Cup Autoignition Temperature: 380°C Explosion Limits: Lower: 0.8% Upper: 16.3% Extinguishing Media: Foam, Carbon Dioxide, Dry Chemical. For large fires, apply water from as far away as possible, using flooding quantities of water applied as mist or spray; solid streams of water may be ineffective. Keep containers cool by use of flooding quantities of water. Protective Equipment: Wear full fire fighting protective clothing, including a full face piece, positive pressure, self contained breathing apparatus to prevent skin and eye contact.
General Information: Remove all sources of ignition. Evacuate area. Wear personal protection to prevent inhalation or contact with eyes or skin. Spills/Leaks: Absorb spill with inert material such as sand, dry-lime, soda ash, vermiculite, earth. Scoop up with non-sparking tool and place in suitable container for disposal. Ventilate area and wash spill site after pick-up is complete.
Handling: Do not breathe vapor. Do not get in eyes, on skin, or on clothing. Avoid prolonged or repeated contact. Wash thoroughly after handling. Remove contaminated clothing and wash before reusing. Use only in a chemical fume hood. Use spark-proof and explosion proof equipment. Do not pressurize, cut, weld, braze, solder, drill, grind or otherwise expose empty containers to sources of heat, sparks or open flames because they may retain residue as liquid or vapor. Storage: Store in tightly closed containers in flammables storage area. Keep away from all sources of ignition. Store in cool, dry area away from heat, sparks and open flame.
Engineering Controls: Safety shower and eye wash station required in work area. Use only in a chemical fume hood. Use only non-sparking tools. Ground all containers involved in liquid transfer, due to tendency to accumulate static charge. Exposure Limits: Chemical Name ACGIH NIOSH OSHA - Final PELs Hexamethyldisilazane none none none OSHA Vacated PELs: none Personal Protective Equipment Eyes: Chemical splash goggles as described in OSHA’s 20 CFR 1910.134 or European Standard EN 149. Skin: Use rubber, neoprene or nitrile gloves to prevent skin contact. Clothing: Wear suitable protective clothing to prevent skin contact. Launder clothing before reusing. Respirators: Use a NIOSH/MSHA or European Standard EN 149 approved respirator. If risk assessment indicates use of air-purifying respirators are needed, use a full-face respirator with multi-purpose or type ABEK respirator cartridges as backup to engineering controls.
Physical State: Liquid Appearance: clear, colorless Odor: ammonia-like pH: >7 Vapor Pressure: 22.9mm @ 20°C Vapor Density: >1 (air=1) Evaporation Rate: ~1 (butyl acetate = 1) Viscosity: 0.9 cSt (centistokes) Boiling Point: 126-127°C Freezing/Melting Point: < -40°C Autoignition Temperature: 380°C Flash Point: 14°C (57°F) Cleveland Open Cup Decomposition Temperature: Not available Explosion Limits: Lower: 0.8% Upper: 16.3% Solubility in water: insoluble Specific Gravity/Density: 0.774 Molecular Formula: C6H19NSi2 Molecular Weight: 161.3
Chemical Stability: Stable in sealed containers in cool area. Conditions to Avoid: Exposure to moist air or water, temperatures above 150° C, ignition sources. Incompatibility with Other Materials: peroxides, oxidizing agents, alcohols, acids. Hazardous Decomposition of Products: Organic acid vapors, nitrogen oxides, carbon monoxide, carbon dioxide, silicon dioxide, formaldehyde. Hazardous Polymerization: Will not occur
RTECS#: JM9230000
LD50/LC50 Information:
LD50 Oral, rat 850 mg/kg
LC50 Inhalation, rat 8700mg/m3/4H
LD50 Oral, mouse 850 mg/kg
LC50 Inhalation, mouse 12 gm/m3/2H
LD50 Dermal, guinea pig 1 mL/kg
Carcinogenicity:
CAS# 999-97-3 is not listed by ACGIH, IARC, NTP, OR CA Prop 65 as a carcinogen.
Teratogenicity: Not available
Reproductive Effects: Not available
Neurotoxicity: Not available
Mutagenicity: Not available
Other Studies: Not available
Exotoxicity: LC50 Fish, brachydanio rerio 88 mg/l/96H EC50 Daphnia, daphnia magna 80 mg/l/48H EC50 Algae, scenedesmus subspicatus 19 mg/l/72H Environmental Fate: Not available Aquatic: May be hazardous to aquatic life if released to open waters. Atmospheric: Not available Physical: Not available
Use a licensed professional disposal service to dispose of this material. May be burned in a chemical incinerator equipped with a scrubber and afterburner, but use extreme caution in igniting as this material is highly flammable. Alternatively may be absorbed onto clay or vermiculite and disposed of as solid waste. Observe all federal, state and local environmental regulations. RCRA P-Series: None listed. RCRA U-Series: None listed.
US DOT Hazard Class: DOT Shipping Name: Flammable Liquid, N.O.S. (hexamethyldisilazane) Hazard Class: 3 SUB: 8 Packing Group: II UN Number: UN2924 IATA (for international shipments) IATA Shipping Name: Flammable liquid, toxic, corrosive, n.o.s. Hazard Class: 3 Packing Group: II UN Number: UN2924 Canada TDG TDG Shipping Name: Flammable Liquid N.O.S. (hexamethyldisilazane) Hazard Class: 3 Packing Group: II UN Number: UN2924
United States: TSCA CAS# 999-97-3 is listed on the TSCA Inventory List. Health & Safety Reporting List None of the chemicals in this product is on the Health & Safety reporting list. Chemical Test Rules None of the chemicals in this product has a Chemical Test Rule. Section 12b: None of the chemicals in this product is listed under TSCA Section 12b. TSCA Significant New Use Rule: None of the chemicals in this product has a SNUR. CERCLA Section 103: None of the chemicals in this product has a RQ. SARA: Section 302 (TPQ) None of the chemicals in this product has a TPQ. SARA Codes: CAS# 999-97-3: immediate, fire, reactive Section 313 None of the chemicals in this product is reportable under SARA Section 313. Clean Air Act: This product does not contain any hazardous air pollutants, any Class 1 Ozone Depletors, or any Class 2 Ozone Depletors. Clean Water Act: This product does not contain any chemical listed as a Hazardous Substance, as a Priority Pollutant, or as a Toxic Pollutant under the Clean Water Act. OSHA: None of the chemicals in this product is considered highly hazardous by OSHA. State (Individual states in the USA) CAS# 999-97-3 is not listed on any state list. California Prop. 65: CAS# 999-97-3 is not listed under California Prop. 65. European/International Regulations: European Labeling in Accordance with EC Directives Hazard Symbols: F, C Risk Phrases: R 11 Highly Flammable. R 18 In use, May form flammable/explosive vapour-air mixture. R 36/37/38 Irritating to eyes, respiratory system and skin. Safety Phrases: S 16 Keep away from sources of ignition – no smoking. S 26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S 29 Do not empty into drains. S 36/37/39 Wear suitable protective clothing, gloves and eye/face protection. S 7/8 Keep container tightly closed and dry S 9 Keep container in well ventilated place. WGK (Water Danger/Protection): CAS# 999-97-3: 1 Canada: WHMIS classification: This product has been classified in accordance with the hazard criteria of the CPR and it contains all the information required by the CPR. DSL/NDSL: CAS# 999-97-3 is listed on the DSL List and is not listed on the NDSL List.
Disclaimer of Liability: Caution! Do not use SPI Supplies products or materials in applications involving implantation within the body; direct or indirect contact with the blood pathway; contact with bone, tissue, tissue fluid, or blood; or prolonged contact with mucous membranes. Products offered by SPI Supplies are not designed or manufactured for use in implantation in the human body or in contact with internal body fluids or tissues. SPI Supplies will not provide to customers making devices for such applications any notice, certification, or information necessary for such medical device use required by US FDA (Food and Drug Administration) regulation or any other statute. SPI Supplies and Structure Probe, Inc. make no representation, promise, express warranty or implied warranty concerning the suitability of these materials for use in implantation in the human body or in contact with internal body tissues of fluids. This product is intended for external contact only with human skin.
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