SPI Supplies Holographic Diffraction Grating 292

Outstanding high magnification high resolution calibration reference and traceable standard for SEM, AFM, Auger and FiB

2.5 µm AFM scan; image presented in
mixed height and slope mode

Average height profile from above AFM image

Introduction:
A precision 292 nm holographic diffraction grating for SEM, AFM, Auger and FIB features high accuracy, usability and stability. Its moderate ridge height makes it the most convenient of specimens for AFM, and SEM, especially for backscattered electron imaging, because of the high contrast between Ti and Si. It is an outstanding sample for high resolution, nanometer-scale measurements.

Specifications of the sample:

Period:
292 nm pitch, one-dimensional grating. Accurate to +/- 1% (3 standard deviations).

Surface:
Titanium lines on Silicon chip, 3 x 4mm. Line height (about 30 nm) and line width (about 130 nm) are not calibrated.

Description of the sample:
The sample is best characterized by its high contrast and excellent edge definition. In AFM, use in contact, intermittent contact (TappingMode™ ) and other modes with image sizes from 500 nm to 20 µm. Use SEM beam voltages from under 1 kV to 30 kV. Useful from 5,000x to over 200,000x. In Auger electron spectroscopy and focused ion beam (FIB) applications, use similar conditions as for SEM.

The calibrated pattern covers the entire 3 x 4 mm chip. There is sufficient area to make literally thousands of measurements without reusing any areas altered or contaminated from pervious scans.

Mounting options:
For SEM applications, SPI Supplies offers the sample ether mounted on a variety of different popular mount geometries, or unmounted. So far as we know, the SPI Holographic Diffraction Grating can be used in any commercially available SEM or stage.

For AFM, the sample can be purchased either unmounted or mounted on 12 mm steel disks.

Non-Traceable vs. Certified
There are two versions, Model 301BE non-traceable and Model 292UTC traceable and certified.

Available products:

For SEM APPLICATIONS:
Model 301BE Holographic Diffraction Grating Magnification Standard
Non-traceable with manufacturer's certificate stating the average period, based on batch measurements.

	Unmounted	SPI #	Each	In Stock
	Unmounted	1500301BEU-AB	$1005.00	No

Mount Choices	Mounted	SPI #	Each	In Stock
	JEOL^® 3/8" (9.5 mm) round mounts x 9.5 mm high	1501301BEM-AB	$1105.50	No
	Topcon^® 15 mm round mounts, 10 mm high	1504301BEM-AB	1105.50	No
	Universal 1" (25.4 mm) round x 20 mm high	1510301BEM-AB	1105.50	No
	FEI^® / Leica^®/ LEO^®/Cambridge^®/Philips^® Pin-Type Mount	1506301BEM-AB	1105.50	No
	AMRAY^® Pin-Type Mount	1509301BEM-AB	1105.50	No
	Hitachi^® Threaded Mount, 26 mm round, 6 mm	1575301BEM-AB	1105.50	No

Certified

Model 292UTC Holographic Diffraction Grating Magnification Standard
This traceable, certified standard is a select grade. Each sample is individually measured in comparison with a similar specimen calibrated at the PTB. (This is the Physikalisch-Technischen Bundesanstalt. As the "national standards laboratory of Germany", it is the German counterpart to NIST in the USA.) The uncertainty of single pitch values is typically +/- 2 nm (95% confidence interval). Multi-pitch measurements provide the usual square-root of N improvement in precision.

	Unmounted	SPI #	Each	In Stock
	Unmounted	1500292UTCU-AB	$3417.00	No

Mount Choices	Mounted	SPI #	Each	In Stock
	JEOL^® 3/8" (9.5 mm) round mounts x 9.5 mm high	1501292UTCM-AB	$3618.00	No
	Topcon^® 15 mm round mounts, 10 mm high	1504292UTCM-AB	3618.00	No
	Universal 1" (25.4 mm) round x 20 mm high	1510292UTCM-AB	3618.00	No
	FEI^® / Leica^®/ LEO^®/Cambridge^®/Philips^® Pin-Type Mount	1506292UTCM-AB	3417.00	No
	AMRAY^® Pin-Type Mount	1509292UTCM-AB	3618.00	No
	Hitachi^® Threaded Mount, 26 mm round, 6 mm	1575292UTCM-AB	3618.00	No

For AFM APPLICATIONS:

Model 301BE Holographic Diffraction Grating Magnification Standard

	Unmounted	SPI #	Each	In Stock
	Unmounted	1500301BEU-AB	$1005.00	No

	Mounted	SPI #	Each	In Stock
	Mounted (On 12mm Steel Disks)	301BEMAFM-AB	$1105.50	No

Model 292UTC Holographic Diffraction Grating Magnification Standard
	Unmounted	1500292UTCU-AB	$3417.00	No
	Mounted (On 12mm Steel Disks)	292UTCMAFM-AB	$3618.00	No

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