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Product Description

This highly innovative and useful and unique product is a magnification calibration standard for ISO-9000 certification procedures. This one standard addresses magnification calibration for light microscopy (transmitted & vertical illumination), confocal microscopy, SEM (backscattered & secondary) and even TEM (using a bulk holder for secondary electron imaging)! This NIST traceable stage micrometer standard has a useful range for horizontal and vertical axes at any magnification from 10X to 50,000X. Can also be used for particle size counting calibration and resolution testing.

Technical Specifications

Size: approximately 9 X 9 X 2.0 mm
Construction: fused silica base with coating of ITO (optically transparent and electrically conductive (100nm) and anti-reflective chromium (100nm) to form the pattern. Retainers are available for ease of handling and protecting the MRS-3. Specify your make and model of microscope. The most common retainer (SEM/R) is 1" OD X 1/8" thick. It has a hole in the center for transmitted optical illumination.

Retainers are available and highly recommended for ease of handling and protecting the MRS-3. Specify your make and model of microscope. The most common retainer (SEM/R) is 1" OD X 1/8" thick. It has a hole in the center for transmitted optical illumination. It is designed specifically for any SEM stage capable of taking a one inch metallographic mount.

Z-direction calibration:

The step height is 100 nm in the vertical direction. The z-calibration is not useful for light microscopy or SEM but can be very useful for confocal and any type of profilometry.

Classification of the different product forms:

The MRS-3 is available in three different forms:
Just the basic product, as described but without any calibrations or certification. This is SPI# 02766-AB. Or as described above but with complete calibration and certification in the X and Y directions (but not the z direction). This is SPI# 02767-AB.

Or as described above but with complete calibration and certification, not just in X and Y but also the Z direction. This is SPI# 02768-AB

Range of use:

The MRS-3 allows calibration of magnifications from about 10X to 50,000X. The maximum dimension is 8.000 +/- .00025 mm in the X and Y dimensions. The smallest dimension is a pitch of 2Ám (1Ám bar + 1Ám space). The three images below were taken with a scanning electron microscope in the backscattered electron mode. They represent only a small part of the patterns available in the MRS-3.

Magnification Reference Standards Magnification Reference Standards Magnification Reference Standards
2Ám pitch pattern- 1Ám bar + 1Ám space, +/- 0.1Ám Circles, 4 sets, 2Ám - 100Ám. 50Ám pitch pattern- 25Ám bar + 5Ám space

Note that it is highly recommended that the MRS-3 Magnification Reference Standard be purchased with the retainer ring for protection of your investment and also for ease of handling and use.

For use in an SEM:

The Magnification Reference Standard is available in three different forms:
DescriptionSPI #EachIn Stock
MRS-3 Not Traceable and without retainer ring 02766-AB$572.00 Add to cartNo
MRS-3XY Calibrated in X and Y directions without retainer ring 02767-AB1,750.99 Add to cartNo
MRS-3XYZ Calibrated in X, Y, and Z directions without retainer ring 02768-AB2,101.19 Add to cartNo
Optional items/services:
Retainer ring - highly recommended 02769-AB116.73 Add to cartNo
Recalibration and cleaning: X and Y 02767R-AB1,167.33 Add to cartNo
Recalibration and cleaning: X, Y, and Z 02768R-AB1,540.36 Add to cartNo
For use in a STEM:
The Magnification Reference Standard is available in three different forms:
(Scanning mode only, not available for transmission mode)
DescriptionSPI #EachIn Stock
MRS-3 (3mm) Not Traceable and without Retainer Ring 02760-AB$757.65 Add to cartNo
MRS-3XY (3mm) Calibrated in X and Y directions without retainer ring 02761-AB1,926.10 Add to cartNo
MRS-3XYZ (3mm) Calibrated in X, Y, and Z directions without retainer ring 02762-AB2,276.29 Add to cartNo
Optional items/services:
DescriptionSPI #EachIn Stock
Recalibration and cleaning: X and Y 02761R-AB1,342.43 Add to cartNo
Recalibration and cleaning: X, Y and Z 02762R-AB1,716.56 Add to cartNo