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This special built-in option provides the means to etch away surface
layer contaminants from the sample, then sputter gold onto it without
breaking vacuum. However, it is important to understand that the etch mode
essentially reverses the polarity of the system, so that one is then
sputtering off of the sample instead of sputtering onto the sample. Since
the same laws of physics would apply in either case, remember that what
can be removed is going to be more or less limited to what can be
sputtered onto the sample in this type of unit, namely precious group
metals. Since the same laws of physics are operating in any low voltage
sputter coater of this type, this inability to etch away other materials,
such as polymers or other organics is not unique to the SPI unit. Examples of good applications for the etch mode:
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Note: Option is built in to the Sputter Coater Module
upon ordering and cannot be retrofitted. (See
Options.)
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