SPI MODULE™ Sputter/Carbon Coaters

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The spare parts listed here are for the SPI Module Sputter/Carbon Coater family of products. For the "original SPI Sputter Coater" models, sold between 1975 to 1983, spare parts are also available.

SPI MODULE™ Vacuum Control Base Unit

The most commonly asked for replacement parts are, as everyone knows, "o" rings. On this page you will find a number of different "o" rings. See our further comments about the different "o" rings and where they are used.

	SPI #	Each		In Stock
Replacement Pyrex® Chamber, 5" (12.7 cm) High x 4" (10.2 cm) Outside Diameter.	11446-AB	$178.13		Yes
Set of two "o" rings for SPI-Module Coater Chamber	11458-AB	14.39		Yes
Replacement Needle Valve	11425N-AB	109.70		Yes
Sometimes needed if the needle valve is over-tightened, and sometimes it fails just from normal wear and use.
Set of three "o" rings for SPI-Module Vacuum Control Base Unit	11460-AB	23.99		Yes
Vacuum Hose 3'3" (101.6 cm) length	V10H/1	840.81		Yes
High quality stainless steel vacuum hose for connecting the base module to the vacuum pump; this distance should be kept to the shortest possible length!
Sputter Module
	SPI #	Each		In Stock
Replacement Sputter Head for SPI-Module Sputter Coater	11430H-AB	$944.58		Yes
Replacement Cables for SPI Sputter Coater Module	11430C-AB	138.54		Yes
Set of three "o" Rings + PTFE Washer for SPI-Module Sputter Head	11459-AB	20.40		Yes
Replacement Cathodes
	SPI #	Each		In Stock
Gold (100%) Cathode	14155-AB	$1,600.00		Yes
60% Gold/40% Palladium Cathode	14156-AB	1,072.49		Yes
Platinum (100%) Cathode	14157-AB	3,382.74		Yes
Palladium (100%) Cathode	14151-AB	716.67		Yes
Silver (100%) Cathode	14152-AB	411.57		Yes
Iridium (100%) Cathode	14167-AB	3,315.61		No
Carbon Module for SPI Module Sputter System
	SPI #	Each		In Stock
Optional Carbon Rod Head	11439-AB	$839.63		No
Set of five "O" rings For SPI Module Carbon Rod Head	11456-AB	16.75		Yes
Replacement Carbon Fiber Head	11428F-AB	579.36		Yes
Set of two "O" Rings For SPI Module Carbon Fiber Head	11457-AB	12.57		Yes
Replacement Cables for SPI Carbon Coater Module	11428C-AB	289.50		Yes