SPI Module ™ Sputter/Carbon Coaters

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Sputter/Carbon Coating the SPI-Module Way!

• Increased cost efficiency, a sputter coater and carbon coater wrapped into one!.
• Significant savings on the total system.
• Significant savings in usable bench space.
• Easily upgraded for extra capabilities.
• Cool sputter coating of precious metals - with magnetically enhanced cathode design.
• Fast coating (up to 200A gold in 20 seconds) - virtually no heat damage to sensitive samples.
• Specimen chamber: 5" (12.7 cm) High x 4" (10.2 cm) Outside Diameter
• Uniform coating - all shapes, sizes. Thickness monitor generally not needed.
• Safety interlocks - ensures that high voltage is not applied until vacuum is achieved.
• Continuously movable sample stage - to easily adjust cathode to sample distance.
• Economical operation - low metal consumption.
• Mobility - compact design allows easy transport from lab to lab.
• Finger bleed vacuum control - with the highest quality needle valve.
• Inert gas entry - inlet in rear.
• Water cooling to sample stage - standard.
• Quick-change cathode assembly - for maximum throughput and minimum sample to sample cycle time.
• One year warranty.

OPTION #1

Carbon Coater System

Includes:

• Vacuum Control Base
• Carbon Coater Module
  With Optional Carbon Rod Head

Optional:

Carbon rod head

	SPI #	Price		In Stock
(110 V)	11427-AB	$ 6156.83		Yes
(220 V)	11427-AX	6156.83		Yes

...With External Pump
Vacuum Base and Carbon Coater Module plus an external 2.1 cubic feet per minute pump, D2.5E made by Leybold Vacuum Product Inc. For installation in a room without outside exhaust we recommend the purchase of an oil mist filter. And for the optimum performance, we recommend the purchase of a foreline trap.

	SPI #	Price		In Stock
(110 V)	11429-AB	$ 7901.46		Yes
(220 V)	11429-AX	7901.46		Yes

Other system configurations and recommended start-up consumables
Thick carbon fiber, high purity, for carbon coating
Recommended spare parts

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OPTION #2

Precious Metal Coating
(e.g. gold coating)

Sputter Coater System

Includes:

• Vacuum Control Base
• Sputter Coater Module

	SPI #	Price		In Stock
(110 V)	12151-AB	$ 6362.36		Yes
(220 V)	12151-AX	6362.36		Yes
with etch mode only (No Pump)
(110 V)	12151E-AB	$ 7607.47		No
(220 V)	12151E-AX	7607.47		Yes
with quartz crystal thickness monitor only (No Pump)
(110v/60 Hz)	12151Q-AB	$ 9083.16		No
(220v/50 Hz)	12151Q-AX	9083.16		No
with etch mode and quartz crystal thickness monitor (No Pump)
(110v/60 Hz)	12151EQ-AB	$ 10322.54		No
(220v/50 Hz)	12151EQ-AX	10322.54		No

...With External Pump
Vacuum Base and Sputter Coater Module plus an external 2.1 cubic feet per minute pump, D2.5E made by Leybold Vacuum Products Inc. For installation in a room without outside exhaust we recommend the purchase of an oil mist filter. And for the optimum performance, we recommend the purchase of a foreline trap.

	SPI #	Price		In Stock
(110 V)	12150-AB	$ 8041.57		Yes
(220 V)	12150-AX	8041.57		Yes
with etch mode only
(110 V)	12150E-AB	$ 9286.68		Yes
(220 V)	12150E-AX	9286.68		Yes
with quartz crystal thickness monitor and no etch mode
(110 V)	12150Q-AB	$ 10762.39		No
(220 V)	12150Q-AX	10762.39		No
with etch mode and quartz crystal thickness monitor
(110 V)	12150EQ-AB	$ 12001.74		No
(220 V)	12150EQ-AX	12001.74		No

Other system configurations and recommended start-up consumables
Replacement cathodes
Recommended spare parts

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OPTION #3

the "works"

Combination Sputter/
Carbon Coater System

"The Works" includes:

• Vacuum Control Base
• Carbon Coater Module
• Sputter Coater Module
  With Optional Carbon Rod Head

	SPI #	Price		In Stock
(110 V)	12155-AB	$ 8472.85		Yes
(220 V)	12155-AX	8472.85		Yes
with etch mode
(110 V)	12155E-AB	$ 9597.95		Yes
(220 V)	12155E-AX	9597.95		Yes
with quartz crystal thickness monitor and no etch mode
(110 V)	12155Q-AB	$ 11183.65		No
(220 V)	12155Q-AX	11183.65		No
with etch mode and quartz crystal thickness monitor
(110 V)	12155EQ-AB	$ 12433.02		No
(220 V)	12155EQ-AX	12433.02		No

...With External Pump
"The Works-Plus" includes Vacuum Control Base, Carbon Coater Module, Sputter Coater Module plus an external 2.1 cubic feet per minute pump, D2.5E made by Leybold Vacuum Product Inc. For installation in a room without outside exhaust we recommend the purchase of an oil mist filter. And for the optimum performance, we recommend the purchase of a foreline trap.

	SPI #	Price		In Stock
(110 V)	12157-AB	$ 10122.54		No
(220 V)	12157-AX	10122.54		Yes
with etch mode
(110 V)	12157E-AB	$ 11367.65		Yes
(220 V)	12157E-AX	11367.65		Yes
with quartz crystal thickness monitor and no etch mode
(110 V)	12157Q-AB	$ 12837.59		No
(220 V)	12157Q-AX	12837.59		No
with etch mode and quartz crystal thickness monitor
(110 V)	12157EQ-AB	$ 14082.70		No
(220 V)	12157EQ-AX	14082.70		No

Other system configurations and recommended start-up consumables
Replacement cathodes
Replacement carbon fiber
Recommended spare parts

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Thousands of end users world wide can't be wrong! Why pay so much more for a coater that does the same thing but for much more money? Be sure you order what you need and do not order what you don't need. Keep in mind the following SPI hints:

A) Very few researchers have a need for sputter etch. If carbon contamination is a problem, it will not be removed by anyone's sputter etch mode system because after all, one just can not sputter carbonaceous materials! If organics have to be removed, then what is needed is an SPI Plasma Prep II plasma etcher.

B) While a quartz crystal thickness monitor could have some utility in some laboratories, the unique approach to reproducible coating thickness through the use of the SPI "test mode" feature enables one on most samples to get a more reproducible thickness than using anyone's quartz crystal thickness monitor. Those working on absolutely inert surfaces, such as silicon, metals, etc., so long as moisture is not going to be absorbed or adsorbed, will realize some benefit but just about anyone else we would recommend saving your money for something that really could be useful to your programs. Be sure you know the principle behind the operation of a quartz crystal thickness monitor.