Model KW-4A Spin Coater

Optional Accessory Listings

One the basic unit is selected, one must consider the appropriate "chuck" for holding the substrate being coated. Furthermore there are available optional purge cabinets, glass lids, and optional 10" bowls and lids to accommodate even larger substrates to be coated.

A few words about chuck size generally:
Generally speaking, the wafer size should be at least 0.25" (6 mm) larger than the chuck. Yet one should not have the wafer too much larger than the chuck size either or else performance will suffer. You should select the chuck precisely on the basis of the wafer size being coated. This might mean more than one chuck size would be purchased. It is also important that the entire chuck surface be completely covered with the wafer, otherwise the coating formulation will be literally sucked into the vacuum system and everything will clog up.

Family of precisely machined vacuum chucks

Although the bowl, especially with the optional 10" bowl is much larger than the largest mentioned wafer size, there is the temptation to think that larger than 6" wafers can be coated. This is not correct. Although some space is indeed needed between the bowl and the outer circumference of the wafer to avoid the phenomenon of "splash-back", a perhaps even more important reason is that the motor in the unit is just not sized to take an 8" wafer and performance will suffer. The exception would be if a thinner- than-normal wafer is being coated. But in order to do that, one would need the 8" chuck.

A few words about PTFE coated chucks:
In general, most users do not need to incur the added expense of a PTFE coated chuck. However, it is recommended for those who absolutely can not tolerate any metal or metal ions in these finished coatings. Note also the PTFE (e.g. polytetrafluoroethylene) is a "soft" polymer and will not last forever. How long it lasts for a particular user will depend on how carefully it is handled and to what it is being exposed and at what temperatures.

Vacuum "chucks"
Identify the largest substrate to be coated and then select the chuck that is the next size smaller.

				PTFE Coated Chuck
Maximum Substrate Size	SPI #	Each	In Stock	SPI #	Each	In Stock
0.5" (12.5 mm)	12188-AB	250.00	Yes	12188T-AB	518.80	Yes
1" (25.4 mm)	12173-AB	250.00	Yes	12173T-AB	529.17	Yes
1˝" (38.1 mm)	12174-AB *	250.00	Yes
2" (50.8 mm)	12176-AB	250.00	Yes	12176T-AB	518.80	Yes
3" (76.2 mm)	12184-AB	350.00	Yes	12184T-AB	634.09	Yes
4" (101.6 mm)	12186-AB	350.00	Yes	12186T-AB	615.98	Yes
5" (127 mm)	12187-AB	400.00	Yes	12187T-AB	703.22	No
6" (152.4 mm)	12189-AB	438.00	Yes	12189T-AB	735.55	No

* Available while supplies last

Note: Be sure to read what we have to say about the coating of 8" wafers in this unit before purchasing this 8" chuck. We can not guarantee that it will work in all applications.

Environmental Control Chamber:
Environmental Control Chamber is designed to provide a controllable environment for fabrication of thin films and coatings via spin coating. Hermetically sealed enclosures provide a controlled atmosphere for a wide range of fabrication and testing operations. Their modular design lets you select the options you need for your operation. All chambers are fabricated to meet rigorous standards for cleanliness and durability. Solvent welding ensures a strong, air-tight structure.

Specification:
Chamber Size	36”W x 24”D x 24”H
Door Opening	9” x 9” with gasketed doors
Arm Ports	8” round with flange for connecting glove
Gas Pos	Ľ” NPT inlet and outlet ball valves
Materials	Polycarbonate or UV Resistant acrylic
Weight	48 lbs

	SPI #	Each	In Stock
Environmental Control Chamber	12164-AB	2864.25	No

Optional Lids:
7" (177.8 mm) Glass	12196-AB	136.41	Yes
10" (254.0 mm) Glass	12197-AB	200.62	Yes
10" (254.0 mm) Metal	12198-AB	170.52	Yes

Optional Bowl:
10" (254 mm)	12199-AB	142.75	No
	12199T-AB	267.48	No

Speed Test Disk (Replacement Part):
Speed Test Disk	12185-AB	80.00	Yes

Spin Coater Accessory Units: HotPlate
For those that want to quickly bake or cure their thin films and coatings, SPI Supplies offers a compact and easy to use hotplate. With the same small footprint as our Spin Coater, the unit is designed to be placed along side of the spin coater of other accessory units. Rugged in design as well as portability. Fabrication of metal oxide films, polymer coatings and organic thin films can now be completing by going directly from the coating onto the hotplate. The temperature range of 50 to 350 C allows great flexibility for the laboratory researcher.

Specifications:
Operation: Manual Loading
Process Control: Programable
Temperature Resolution: 1°C
Temperature Range: 50-350°C
Maximum Substrate Size: 6 inch diameter

	SPI #	Each	In Stock
Hotplate KW-4AH 110V	12160-AB	1925.00	No
Hotplate KW-4AH 220V	12160-AX	1925.00	No

Spin Coater Accessory Units: UV Curer
As with the Hotplate described above, this unit can be added as a Spin Coater accessory. For easy UV curing of applied films, this low power unit operates at a wavelength of 254nm.

Specifications:
UV Wavelength: 254nm
Power output: 2 tubes, 4 watts/tube
Turn plate: 6 rpm
Dimensions: 8I x 9F inches (???)
Compliance: CE compliant and supplied with a U.S. plug

	SPI #	Each	In Stock
UV Curer KW-4AC 110V	12163-AB	2310.00	No
UV Curer KW-4AC 220V	12163-AX	2310.00	No

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