

| Sample | RMS (Rq) | Mean Roughness (Ra) | Max. Height (Rmax) | Surface Area Diff | Box dimensions |
| SPI | |||||
| B8 | 0.74 nm | 0.48 nm | 24.11 nm | 0.21% | 5000 nm |
| A7 | 0.67 | 0.47 | 12.89 | 0.19 | 5000 |
| Competitor | |||||
| A | 0.88 | 0.54 | 17.85 nm | 0.25 | 5000 |
| B | 7.65 | 1.30 | 192.16 | 0.60 | 5000 |
| B (ex) | 0.78 | 0.50 | 16.02 | 0.61 | 5000 |
Figure 1 is a dual height and phase image of an SPI grid. Here the sample surface is viewed from the top. In the height image, bright yellow and white indicates high spots and dark red or brown indicates low spots. The surface contains many tiny bumps which contribute to the roughness tabulated above. In the phase image, bright and dark contrast is related to edges and slopes and serves here to highlight the tiny bumps. |
Figure 2 is a perspective view of the height data for the SPI grid. Note that the magnification of the Z axis is much higher than the XY magnification, so that you can perceive the fine structure of what is really an extremely smooth surface. Such dual magnification is customary in the AFM field. |
Figure 3 is the same type of image as figure 1, here showing a competitor grid. |
![]() Figure 4 is a perspective view of the height data for the competitor grid. |
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