SC-1000 SEM Sample Preparation System

The SC-1000 model is equipped both with high- and low-energy ion sources. Rapid slope cutting with the high-energy ion gun followed by gentle surface cleaning with the low-energy ion gun provides cross-sectional SEM samples suitable for semiconductor failure analysis and other analytical purposes. The system also provides an ion milling based solution for improving and cleaning of mechanically polished SEM samples and preparation of damage-free surfaces for EBSD technique.

• Cross-sectional sample preparation by slope cutting
• Final polishing and cleaning of traditional SEM and EBSD samples
• High-energy ion gun for rapid milling
• Low-energy ion gun for gentle surface polishing and cleaning
• Automated parameter settings and operation
• Sample rotation and oscillation
• Site-specific sample preparation with high-precision positioning
• Real-time monitoring of the milling process by high resolution CCD camera and TFT monitor

Product Information Sheet

Volts	SPI #	Each		In Stock
SC-1000 SEM Sample Preparation System	19025-AB	$91,800.00		No
Consumable package for the base unit included Set of seals (O-rings, teflon parts) Fuses HV external cable for the low-energy ion gun HV external cable for the high-energy ion gun beam blocker blade (mask) sample carrier plate (4 types) stage protecting plate (2 pieces) screws	19026-AB	$2,433.04		No
Consumable package for the focused high-energy ion gun included Focusing electrode Cathode cylinders - 1 pair Normal cathodes - 1 pair Focusing system output aperture Anode Ceramic insulators for anode Ceramic insulators for focused electrode	19027-AB	$2,643.09		No
Consumable package for low-energy ion gun included Hot cathodes Rear electrode system (G1+G2+G3/2) Ceramic insulators for anode Ceramic insulators for focused electrode	19028-AB	$2,450.54		No
Consumable package for the SC-1000 (19026-AB + 19027-AB + 19028-AB)	19029-AB	$7,526.66		No