Robinson™ Backscattered Electron (BSE) Detector for Scanning Electron Microscopes

Cathodoluminescence detector is of particular value for those studying semiconductor materials

Introduction:
Some materials have the characteristic that when bombarded with electrons, they emit photos, and those in the visible range are able to be detected with the kind of cathodoluminescence detector that can be purchased on conjunction with a Robinson backscattered electron detector.

Examples of cathodoluminescence images:
We present these images to make the point of how valuable this kind of information can be in terms of understanding certain systems:


SE semiconductor surface, 5 kV		CL image of semiconductor surface, 5 kV. Note the high quality of the image compared to the SE image in Figure 4a.

Note that the signal from the CL image of the sample has a similar signal to noise to the SE image, at an accelerating voltage of 5 kV. We believe this is quite good because the CL image, like the BSE image, depends on the energy of the beam and being able to get a high signal CL image at 5 kV is quite useful in showing just the surface CL detail.

The cathodoluminescence detector can be purchased either at the time of purchase of the basic Robinson BSE detector or it can be purchased at a later time. Once one has the Robinson Model 8.6 (or any other retractable Robinson BSE detector which would be Series 2 or later) all they would need additional is the parabolic mirror detection head which is easily installed by the customer. To install the cathodoluminescence detector, the Robinson BSE detector would have to be taken out of the column, undo the four screws holding the scintillator in place, and remove the scintillator. The cathodoluminescence detector head is put into the Robinson detector (where the scintillator had once been) and the entire assembly put back into the SEM.

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