SPI-Module™ Sputter/Carbon Coater System
IX. Summary of Specifications for SPI-Module Sputter/Carbon Coater System
Specifications
Vacuum chamber: 4" (10.2 cm) outside diameter(OD) x 5" (12.7 cm) high
with 0.25" (6.4 mm) thick implosion proof Pyrex® glass
construction.
Specimen stage: 2.5" (6.35 cm) continuously adjustable; capacity for
at least 6 standard size specimens 0.5" (12.5 mm) diameter.
Cathode diameter: 57mm diameter, 3 mils (76 um) thick original
equipment, 10 mils (254 um) thick.
Power supply:
Available cathodes:
Available carbon: fiber and rod for fiber and rod heads
respectively
Vacuum monitor: Pirani vacuum gauge built-in.
Automatic timer: Built-in (0.2 minutes).
Vacuum pump: external: 57 liters/min. for 110 volt/6OHz operation;
47.5 liters/min for 50 Hz.
Cooling water connections
Connections for inert gas inlet/outlet:
Inlet gas control valve:
Specimen stage continuously variable in "Z" direction:
Electrical requirements: 110v/60 Hz - 15 amps or 220v/50 Hz - 7.5 amps
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Sunday July 20, 2008
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