SPI-Module™ Sputter/Carbon Coater System
V. More information on sputtering of metals
The 15 nm in 10 seconds applies for gold cathodes only. Other metals will
sputter at slightly to moderately slower rates depending on work
function. The higher the work function, the more difficult it is to
sputter that particular metal and therefore the slower the sputtering
rate. The precious metals, as a group have the lowest work functions,
and therefore all can be sputtered relatively quickly, gold being the
fastest (it has the lowest work function).
Our 15 second tests were made on an ideally flat, planar, non-off gassing
inert sample. On double-sided tape or sheets or on samples with more
complex geometries, it will take more time to make a suitable coating.
Samples undergoing off-gassing will also take longer because, so long as
the off-gassing continues, the actual deposition rate will be
far less or as we have learned in recent years, sometimes it dropped
to zero altogether.
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Sunday March 21, 2010
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