
SPI-Module Sputter/Carbon Coater System
We recommend gold as the metal of choice, primarily because the
sputtering rate of gold, under any particular set of operating
conditions, is higher than any other precious (or any other) metal.
Although the popular perception is that the popular 60% Au/ 40% Pd alloy
produces a slightly smaller
grain size, from what we have seen we believe few microscopists realize any
benefit in terms of
better resolution in their micrographs from its use. Furthermore, when
using gold for heat sensitive samples, because of the shorter sputtering
times, one realizes lower heating effects from the glow of the plasma.
All SPI-Module Sputter Coaters feature "quick-change" targets which are
available in Au, Au/Pd, Pt and Ag. All new instruments are supplied with
a target of 100% Au which is 3 mils (76 um) thick.
Replacement targets,
which are all 10 mils (254 um/0.254mm) thick, are available in a variety of
precious metals and alloys, including gold, platinum, palladium, silver
and 60% gold/40% palladium alloy.
Note: Most other manufacturers' replacement cathodes are only 3 to 5
mils thick even though their prices are comparable to SPI's 10 mil
price! If you have some other brand of sputter coater currently, be sure
to look at current prices for
SPI replacement
targets for other coaters.
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Friday July 25, 2008
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