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SPI MODULE™ Sputter/Carbon Coaters

Always keep replacement spare parts on hand for emergencies!


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The spare parts listed here are for the SPI Module Sputter/Carbon Coater family of products. For the "original SPI Sputter Coater" models, sold between 1975 to 1983, spare parts are also available.


SPI MODULE™ Vacuum Control Base Unit

The most commonly asked for replacement parts are, as everyone knows, "o" rings. On this page you will find a number of different "o" rings. See our further comments about the different "o" rings and where they are used.

Sputter Module

SPI #EachIn Stock
Replacement Pyrex®
Chamber, 5" (12.7 cm) High x 4" (10.2 cm)
Outside Diameter.		11446-AB$163.07 Add to cartYes11446 Click to view at a larger scale

Set of two "o" rings for
SPI-Module Coater Chamber
11458-AB
  13.17
Add to cart		Yes11458 Click to view at a larger scale

Replacement Needle Valve11425N-AB  100.42 Add to cartYes11425n Click to view at a larger scale
Sometimes needed if the needle valve is
over-tightened, and sometimes it fails
just from normal wear and use.

Set of three "o" rings for
SPI-Module Vacuum Control Base Unit
11460-AB
  21.96
Add to cart		Yes11460 Click to view at a larger scale

Vacuum Hose 3'3" (101.6 cm) length V10H/1   769.68 Add to cart Yes
High quality vacuum hose for connecting
the base module to the vacuum pump; this
distance should be kept to the shortest
possible length!

SPI #EachIn Stock
Replacement Sputter Head for
SPI-Module Sputter Coater
11430H-AB
$864.67
Add to cart		Yes11430h Click to view at a larger scale

Replacement Cables for
SPI Sputter Coater Module
11430C-AB
126.82
Add to cart		Yes11430c Click to view at a larger scale

Set of three "o" rings for
SPI-Module Sputter Head
11459-AB
  16.46
Add to cart		Yes11459 Click to view at a larger scale


Replacement Cathodes

SPI # Each In Stock Cathode - Click to view at a larger scale
Gold (100%) Cathode 14155-AB$840.00 Add to cartYes
60% Gold/40% Palladium Cathode 14156-AB  775.00 Add to cartYes
Platinum (100%) Cathode 14157-AB  1915.00 Add to cartYes
Palladium (100%) Cathode 14151-AB  613.50 Add to cartYes
Silver (100%) Cathode 14152-AB   232.99 Add to cart Yes
Iridium (100%) Cathode 14167-AB   1877.00 Add to cart Yes


Carbon Module for SPI Module Sputter System

SPI #EachIn Stock
Optional carbon rod head 11439-AB$807.03 Add to cartYes11439 Click to view at a larger scale
Replacement carbon fiber head 11428F-AB  530.34 Add to cartYes11428f Click to view at a larger scale
Replacement Cables for
SPI Carbon Coater Module
11428C-AB
    34.59
Add to cart		Yes11428c Click to view at a larger scale
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Monday May 12, 2008
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