SPI MODULE™ Sputter/Carbon Coaters

Chinese

Spanish

SPI MODULE™ Vacuum Control Base Unit

Sputter Module

	SPI #	Each		In Stock
Replacement Pyrex®
Chamber, 5" (12.7 cm) High x 4" (10.2 cm) Outside Diameter.	11446-AB	$171.22		Yes
Set of two "o" rings for SPI-Module Coater Chamber	11458-AB	13.83		No
Replacement Needle Valve	11425N-AB	105.44		No
Sometimes needed if the needle valve is over-tightened, and sometimes it fails just from normal wear and use.
Set of three "o" rings for SPI-Module Vacuum Control Base Unit	11460-AB	23.06		No
Vacuum Hose 3'3" (101.6 cm) length	V10H/1	808.16		Yes
High quality stainless steel vacuum hose for connecting the base module to the vacuum pump; this distance should be kept to the shortest possible length!
	SPI #	Each		In Stock
Replacement Sputter Head for SPI-Module Sputter Coater	11430H-AB	$907.90		No
Replacement Cables for SPI Sputter Coater Module	11430C-AB	133.16		Yes
Set of three "o" rings for SPI-Module Sputter Head	11459-AB	17.28		No
Replacement Cathodes
	SPI #	Each		In Stock
Gold (100%) Cathode	14155-AB	$1034.77		Yes
60% Gold/40% Palladium Cathode	14156-AB	981.75		Yes
Platinum (100%) Cathode	14157-AB	3096.56		Yes
Palladium (100%) Cathode	14151-AB	656.04		Yes
Silver (100%) Cathode	14152-AB	376.75		Yes
Iridium (100%) Cathode	14167-AB	3035.11		Yes
Carbon Module for SPI Module Sputter System
	SPI #	Each		In Stock
Optional Carbon Rod Head	11439-AB	$807.03		Yes
Set of five "O" rings For SPI Module Carbon Rod Head	11456-AB	$16.10		No
Replacement carbon fiber head	11428F-AB	556.86		Yes
Set of two "O" rings For SPI Module Carbon Fiber Head	11457-AB	$12.08		No
Replacement Cables for SPI Carbon Coater Module	11428C-AB	278.25		Yes