SPI-Module Sputter/Carbon Coater System
Among the many advantages of the SPI-Module approach are:
I. Introduction
1. The purchaser need not commit to the purchase of one large
deluxe system which may contain features that are unnecessary
for the work being done in that laboratory.
2. You buy only the capabilities you need; add others later, as you
need them. Everything clicks together... powered by one vacuum
control system. Nothing could be easier to install or to set up and
start using!
3. The counter space of one coating instrument now accommodates two
coating capabilities in one space, in one totally modular unit.
The SPI-Module Sputter/Carbon Coaters are described in detail in this
proposal. Note the for all configurations of the system, the pump is an
external pump, standing alone, on the floor, outside the cabinet of the
vacuum control module. The world wide SEM community has expressed a
strong preference for this configuration over "internal pump" models for
a number of different but important reasons, to be covered later in this
proposal.
If you have a suitable pump already available in your lab, you should be
able to be spared the additional expense of purchasing yet another vacuum
pump, however, do make certain that it is in good operating condition,
that is has a fresh charge of pump fluid, and that it is up to the task
of pumping out your new SPI Sputter and/or Carbon Coater system.
Otherwise you will definitely need a
new pump.
This Is How The System Works
a) For sputter coating only, one would purchase one of the
following packages:
SPI# l2lSl SPI-MODULE Sputter Coater including a SPI-MODULE
Sputter Coater Module and a
SPI MODULE Vacuum Control Base Unit, with
customer supplying the pump or SPI #12150
SPI-MODULE Sputter Coater
package including all of above plus our recommended pump (separate
pump included) or (Both units include a vacuum control unit).
To add carbon coating capability to the sputter coater at some later time
add:
SPI #11428
SPI-MODULE Carbon Coater Module which would sit. (It
sits on top of the
now already existing sputter coater module, and runs off the power supply of
vacuum control base module).
b) For carbon coating only, one would purchase:
SPI #11427
SPI-MODULE Carbon Coater (no pump). The "package"
includes a
SPI-MODULE Carbon Coater module and a
SPI-MODULE vacuum
control base module. If a pump is needed, then what should be ordered
would be SPI-MODULE Carbon Coater which would include all of the above
PLUS the recommended pump.
To add sputter coating capability to the existing carbon coater unit, add
SPI #11430 SPI-MODULE Sputter Module, which would sit on top of (or
underneath) the
existing carbon coater module and runs off of the power
supply of the existing
SPI-Module Vacuum
Control base module.
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Friday August 08, 2008
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