SPI Plasma Prep™ III Plasma Etcher

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The Plasma Prep III (PP III) is the new generation of the popular and long serving Plasma Prep II RF based unit. With its compact tabletop design and ease of use, the new generation now employs a solid state design to deliver the same 100W system performance. Furthermore, the small footprint allows the system to fit neatly in most any laboratory environment.

Why Solid State?

The PP III design is based on the popular PP II system and one may wonder why one should consider buying the solid state version of this tube system. The purpose to build such a system was twofold.

1. With a decreasing inventory of RF tubes and unreliable sources of RF tubes for our current PP II design, there may come the day when we will no longer be able to provide tubes for new systems as well as units in the field. While we do not see this occurring for quite some time, and our inventories are high, the introduction of a solid state unit allows for the choice and the transition to a solid state unit.
2. The RF tube system gives stability that is quite good; however, it is to some degree limited. The PP II system typically the unit runs at 60 to 100W and down to perhaps 30 watts. However, at that lower range, it is more difficult to maintain a stable power level. The PP III Low Power system provides the ability to have greater control in these lower power ranges, running from 1 to 10 watts. Now with the PP III, you can run your system from 1 to 100W with great stability and ease of use. So for those end users who are looking for power levels other than full power, this system may be better suited for you.

Incorporated Vacuum Gauge

The PP III has an internal vacuum gauge as part of the system, no longer needing an external vacuum meter to monitor or diagnose the system.

Features:

• Flexible range. Capable of 1 to 100W operation
• Greater stability
• Reproducible conditions.
• Same small footprint as the PP II (10.5" H X 14.75" W X 12" D measurements)
• Integrated vacuum gauge
• Measurement and adjustment of forward and reverse power
• Digital metering
• 110/220V compatible
• 4" diameter x 6" depth Pyrex or Quartz Chamber

Who would use this system

The basic functions and use of the PP III is identical to that of the PP II. For those users who have long process times (in terms of tens of hours to days) the solid state unit provides for excellent stability so that the user can run the system overnight without concern about a change in operating conditions.

For those with or looking at multiple systems, the PP III allows easy adjustment of system conditions so those units in the same laboratory, or even those in different locations can be run in a similar fashion. Of course, there still remain a number of external variables that may affect these systems including gas and gas pressures and difference in line voltages.

The PP III operates at 13.56 MHz operation. It is CE Certified and RoHS Compliant.

The unit can quickly be set up in your laboratory. You will need a mechanical pump. We recommend the Leybold D4B which is our Fomblin filled 2-stage mechanical pump with an oil mist filter. This will complete your system. Add your tank of process gas and hosing to the gas inlet and you are ready to run your system.

The PP III has one gas input though an optional gas manifold is available. Many gases and gas mixtures may be used including oxygen, argon and carbon tetrafloride. Quite a bit is known about what plasma chemistry is needed to etch different materials.

	SPI #	Each		In Stock
PP III 110V Pyrex	11050-AB	$10,585.55		Yes
PP III 220V Pyrex	11050-AX	10,585.55		Yes
PP III 110V Quartz	11050Q-AB	12,786.23		Yes
PP III 220V Quartz	11050Q-AX	12,786.23		Yes
Pump	10405-AB	6,018.85		No
Oil mist filter	10410LK-AB	424.13		No

Optional glass sample table

The table provides a convenient surface for your sample placement, having a number of holes to aid in gas flow. The table brings samples up to mid height and provides a smooth flat surface. (4"x6").

	SPI #	Each		In Stock
PP Table Glass	11009/SHELF-AB	$216.62		Yes
PP Table Quartz	11009Q/SHELF-AB	501.42		Yes

Spare Parts for PP III

Special Safety Message:We recommend the Leybold Model D4B 2.8 cubic feet/min. pump charged with Fomblin pump fluid, SPI # 10405-AB. The Leybold Model D2.5E 2.1 cubic feet/min pump, SPI # 10404-AB, has adequate pumping capacity, but it is not available charged with Fomblin fluid.

Check out our list of Spare Parts for the SPI Plasma Prep II and Plasma Prep III.