SPI Plasma-Prep™ II Plasma Etcher
What comes with the unit and what is still needed for operation
Nothing could be easier than setting up for operation, the SPI Plasma Prep
II unit.
For one thing, there are only two lines that have to be hooked up to the SPI
Plasma Prep II:
You will need a two stage regulator for the gas cylinder(s). Typically,
plastic tubing is run from the regulator to the barbed fitting on the gas
inlet side of the Plasma Prep II. If you don't like the idea of plastic
tubing and prefer copper tubing, then this barbed fitting can be removed
and mated with the male NPT fitting on the SPI Plasma Prep II unit.
Currently, SPI Plasma Prep II units are shipped with a 6' section of vacuum
hose. The hose fits tightly over the vacuum outlet on the unit and is held
in place with a hose clamp (supplied). The hose can be adapted accordingly
to your vacuum pump.
Other highly recommended optional items:
We would suggest purchasing an oil mist filter
for the vacuum pump. This will reduce greatly the release of any oil aerosol that could get out into the
lab and cause eye irritation to those working close by. We would also
recommend the use of a
foreline trap in order to minimize the possibility of
any oil vapors from the mechanical pump backstreaming into the Plasma Prep II unit.
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Saturday July 04, 2009
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