SPI Supplies

SPI Plasma-Prep™ II Plasma Etcher

What comes with the unit and what is still needed for operation


Nothing could be easier than setting up for operation, the SPI Plasma Prep II unit.

For one thing, there are only two lines that have to be hooked up to the SPI Plasma Prep II:

You will need a two stage regulator for the gas cylinder(s). Typically, plastic tubing is run from the regulator to the barbed fitting on the gas inlet side of the Plasma Prep II. If you don't like the idea of plastic tubing and prefer copper tubing, then this barbed fitting can be removed and mated with the male NPT fitting on the SPI Plasma Prep II unit.

Currently, SPI Plasma Prep II units are shipped with a 6' section of vacuum hose. The hose fits tightly over the vacuum outlet on the unit and is held in place with a hose clamp (supplied). The hose can be adapted accordingly to your vacuum pump.

Other highly recommended optional items:
We would suggest purchasing an oil mist filter for the vacuum pump. This will reduce greatly the release of any oil aerosol that could get out into the lab and cause eye irritation to those working close by. We would also recommend the use of a foreline trap in order to minimize the possibility of any oil vapors from the mechanical pump backstreaming into the Plasma Prep II unit.


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Friday August 08, 2008
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