INSTALLATION AND PREPARATION FOR USE| FACILITY REQUIREMENTS | |
| 2-1 | The Plasma-Prep II is designed for table top use. The facility requirements to operate the Plasma-Prep II are: |
| a. | Vacuum pump capable of 50-100 liters per minute. We recommend the SPI#10405-AB (equipped with Fomblin oil). For use with CF4 process gas 10404-AB (with hydrocarbon oil) is recommended. |
| b. | Gas supply - oxygen (O2), industrial grade with regulator capable of supplying 5 PSIG, and shut off valve. |
| c. | 120 VAC 50/60 Hz, 15 amp service. |
| SITE REQUIREMENTS | |
| 2-2 | There are very few constraints on the location of the Plasma-Prep II in use. The machine should be operated in a well ventilated area away from any corrosive fumes. The supply from the cooling fan should not be obstructed. The machine's exhaust (the vacuum pump exhaust) should be vented away from operating personnel. Finally, the machine should be far enough away from high voltage equipment to prevent possible high voltage interference. |
| ASSEMBLY | |
| 2-3 | The only assembly required when installing a Plasma-Prep II consists of putting the outer chamber into the electrodes, connections to gas, vacuum and electrical power. |
| INSTALLING THE OUTER CHAMBER | |
| (Fig. 2-1) - with the machine resting on a convenient work surface, remove the four screws (two on each side) at the bottom of the sheet metal top cover. Remove the top cover only. | |
| a. | Open the door and remove the two nylon screws and spacing bushings on the left side and loosen the two nylon screws on the right side. |
| b. | Remove the outer chamber from its shipping container. Make sure no packing material is in the chamber. |
| c. | Lift the upper shell (cover will "hinge" on the two loosened screws). Slide chamber to the rear of the shell and engage the two silicon tubes over the barbed fittings on the glass chamber. |
| d. | Locate the exhaust manifold at the front-center floor of the cabinet. Loosen the brass compression nut to accept the extension of the outer chamber for fitting into vacuum manifold. |
| e. | Following insertion of the glass extension inside the manifold, tighten the knurled compression nut, finger tight. DO NOT OVERTIGHTEN as this can affect the vacuum. |
| f. | Replace the two nylon screws that were removed from the left side and retighten them. DO NOT OVERTIGHTEN as this can damage the threads. |
| WARNING | |
| Never use metallic screws in place of the nylon screws. Metal, even this small amount, will short circuit the chamber's electrodes. | |
| 2-3.1 CONNECTING VACUUM HOSE | |
| A. | On Fig. 3-2 the vacuum connection show is a NW16 flange connector. Supplied are a metal hose, ?O? ring, centering ring and a flange clamp. If a Pump was purchased with the system then these items are supplied for the pump end also. If not then it will depend on your pump arrangement as to what will be needed. |
| b. | Connect the regulated gas supply hose to the quarter-inch fitting GAS IN, Item 12 of Figure 3-2, located at rear of the machine. |
| ***WARNING*** | |
| Make sure that the VACUUM switch, the RF switch and the METER switch are all off (down position). Turn the LEVEL control fully counterclockwise. | |
| 2-3.2 | INSTALLING THE INNER CHAMBER |
| a. | On the Inner Chamber Section, make sure that the sealing "O" ring is not twisted and will seat against the inner lip of the chamber section. |
| b. | Carefully insert the Inner Chamber into the Outer Chamber, orienting the slot perforations to the bottom of the chamber. There are four little glass knobs, which function as "feet" to provide some space at the bottom between the Inner and Outer Chamber sections. |
| 2-3.3 | INSTALLING THE RF POWER TUBES |
| a. | Remove the RF power tubes from their shipping container. As a matter of good practice, handle the tubes by their ends rather than in the middle. Use clean hands to avoid depositing finger oils on the glass barrel of the tube. Install the tubes into their sockets. The tube base and socket are keyed by one tube prong being larger this allows the proper orientation of the tube in the socket. |
| b. | Put the power tube connectors (these are taped to the top of the chassis for shipping) on the tube plate caps on the top of each tube and secure them with the hardware supplied with the connector. |
| c. | Replace the top cover and secure with the four screws. |
| NOTE OF CAUTION: There are two interlock switches mounted on the right side (as viewed from the front) at chassis height. These are lever types. When replacing the top cover, be sure to pull it slightly up, to clear the switch levers, to avoid damaging the interlock switches. | |
| 2-3.3 | INSTALLATION OF OPTIONAL VACUUM GAUGE |
| SPI# 11019 VACUUM GAUGE INSTALLATION INSTRUCTIONS | |
| Remove PP63 pipe plug located on rear of instrument, labeled pressure port. Tape the thermocouple tube, which has 1/8" NPT, using PTFE tape. Three wraps should be sufficient. Screw gauge into where PP63 pipe plug has been removed. Insert and tighten with wrench. | |
| DO NOT OVERTIGHTEN | |
| Plug in octal socket into thermocouple gauge tube. Insert 110AC plug into 110 grounded AC outlet. Green indicator light will come on. | |
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