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SPI Plasma Prep™ II User's Manual

Exact copy of what you will receive with the purchase of an SPI Plasma Prep II plasma etcher



click here for the Manual The User's Manual is written so that it will be relavent even to the first time user of the SPI Plasma Prep II table top plasma etcher. Plasma Prep II Animation

TABLE OF CONTENTS

SECTIONTITLE
1GENERAL DESCRIPTION
1-1General Comments..........................................6
1-2Functional Description......................................6
1-2.1RF Generator...................................................6
1-2.2Vacuum System...............................................7
1-2.3Gas Supply System..........................................7
1-2.4Reaction Chamber...........................................7
1-2.5Audio Alarm System.......................................7
1-3Safety Information...........................................8
1-4Description of Plasma Process.........................8
1-5Access to Process Monitoring.........................8

2INSTALLATION AND PREPARATION FOR USE
2-1Facility Requirements......................................10
2-2Site Requirements...........................................10
2-3Assembly.......................................................10
2-3.1Connecting Vacuum Hose..............................12
2-3.2Installing the Inner Chamber...........................13
2-3.3Installation of Optional Vacuum Gauge...........14

3OPERATION
3-1General.........................................................15
3-2Controls and Indicators.................................15
3-3Operation.....................................................15
3-4Other Useful Information...............................17

4USER MAINTENANCE
4-1General.........................................................22
4-2Cleaning........................................................22
4-3Replacing RF Tubes......................................22
4-4Tuning the RF Oscillator................................23
4-5Vacuum System Adjustments........................23
4-6Successful Functioning of your Equipment......25
4-7Spare Parts List.............................................25
4-8Customet Return Information.........................26
4-9Substrates to be Etched.................................26

LIST OF ILLUSTRATIONS

FIGURE NO.TITLE
2-1Connection to Vacuum Manifold...................12
3-1Front View of Plasma-Prep II Controls
and Indicators...............................................19
3-2Rear View of Plasma-Prep II Controls
and Indicators...............................................20
4-1Bottom View of Plasma-Prep II Showing
Oscillator Tuning Capacitor Location.............24

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Sunday July 06, 2008
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