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The use of perfluorinated polyether pump fluid is recommended for any pump interfaced to a reactive plasma etcher. Although problems in the past(e.g. explosions) have involved only much larger production sized vacuum pumps, most institutional safety departments will not permit the hooking up of an ordinary hydrocarbon charged pump fluid to a reactive plasma etcher system. That is why we urge customers to take this into consideration prior to the placing of any order.
With regard to the pump itself, we(e.g. our customers) have had outstanding reliability of their Edwards and Leybold pumps. Furthermore, when a pump is "Fomblinized", that is, it is charged with the Fomblin pump fluid, we believe that that particular pump is being stressed somewhat more than would otherwise have been the case. We also believe that these pumps will withstand better than other pumps the aggressive environment associated with the use of CF4. Putting it another way, it is our belief that these two brands of pumps charged with perfluorinated polyether pump fluid tend to last longer than other pumps and that is why we feature only the pumps by Leybold and Edwards.
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