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SPI Plasma-Prep™ II Plasma Etcher, Cleaner and Asher




Standardizing the Performance of the PlasmaPrep II:
Sometimes it is necessary to standardize the performance of different PlasmaPrep II units so that each one is giving the same results. Examples are when the same protocol is being conducted in laboratories in different countries, when a laboratory with a high sample throughput needs to obtain the same results from different units in the same laboratory or when the protocol must give the same results for samples prepared at different times.

The process of low temperature dry etching involves many variables, some of which are easy to control and some of which are very difficult to control.

The obvious ones include the various settings on the instrument itself and the gas supply, but there are others. One example of a problem in reproducing results from one location to another is that the line voltage may vary from location to location, causing the instrument to behave differently in each. Another is that gas mixtures obtained from different vendors may not be identical. Attempting to get the same results in different locations, from different units in the same location or even from the same unit at different times can be very frustrating. Obtaining consistent etching from run to run can be a challenge because there are so many variables to control. As an example, we find that the size and shape of the container holding the specimen (for example a glass jar vs. a Petri dish) may be a more important factor than any instrument setting.

Another example of a problem area is line voltage. Even with the same nominal voltage, the actual voltage at the outlet may vary by several volts from laboratory to laboratory, affecting the maximum power delivered to the reaction chamber of the PlasmaPrep II.

Fortunately, one of the things that we have in our favor is that the processes such as etching samples prior to SEM examination is very forgiving. Similar results may be obtained even though there is a considerable difference in the amount of etching which an individual sample experiences. Best practice, however, is to standardize the preparation procedure, and the problem was solved several years ago.

In the analysis of air samples for asbestos fibers, the fibers are captured on a polycarbonate membrane filter, and then it is necessary to etch away part of the filter in order to increase specimen contrast. Not enough etching gives low contrast in the TEM examination. Too much etching risks loss of the fiber. It was decided that the analysis should be standardized on etching away 10% of the filter, and a protocol was developed to allow that to be done in laboratories all over the world, using equipment from any manufacturer. This is the basis for the way in which we "calibrate" the PlasmaPrep II units in our own laboratory. It involves the use of a standard, reproducible sample. For TEM asbestos analysis, we calibrate using polycarbonate membrane filters similar to those being used to capture the suspected asbestos fibers, but for general use, and for a test that can be conducted in laboratories almost anywhere, we use a piece of laboratory filter paper.

In chemical analysis it is frequently necessary to capture something on a filter and then to destroy the filter in order to recover the material. For this purpose, there are filters, which leave essentially zero residue when they are ashed to destruction. These filters are very consistent from batch to batch and essentially identical within a particular batch. If we take a portion of one of those filters (we use one fourth of a specific 47 mm diameter filter, but the point is to standardize on a specific sample material) and measure the time to completely destroy the filter under a known set of operating conditions, then we can estimate the time necessary to etch away a known portion of that filter, such as 10% in the asbestos analysis example. If all of the laboratories involved use the same filter material, then we can standardize an etching protocol to remove a specific amount of material, and that protocol will give constant results from laboratory to laboratory by keeping the etching conditions constant in each unit and varying the etching time to give the same percentage of destruction of the filter. Whatever it is that is being etched away, a standard amount of etching can be established that will etch each sample the same, even in laboratories located around the world from each other. For asbestos analysis, the experience in many laboratories has shown that calibration once each month gives good reproducibility from laboratory to laboratory. In addition, ashing a piece of low residue filter paper to destruction gives a good benchmark of instrument performance; if the filter paper is not destroyed by the plasma, then something is not working properly in the PlasmaPrep II.

A similar protocol can be developed which uses a reference sample which is more specific to the particular samples being etched, but the low residue filter paper sample provides a good basis for evaluating and calibrating the performance of the PlasmaPrep II anywhere.


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Saturday July 04, 2009
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