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Accurate measurement requires accurate calibration and consistent accurate calibration requires standards checked and traceable back to the internationally recognized length scale (SI meter). Since the calibration of over time, accurate and reliable standards are essential for periodic calibration check and correction.
SPI Supplies traceable calibration specimens meet those needs at the nanometer scale. These specimens are useable with variety of measurement tools such as the Atomic Force and Scanning Electron Microscopes. These specimens are traceable to SI meter and come with a certificate stating both the means feature spacing (pitch) and the uncertainty of single pitch measurements.
Traceable Calibration is now available for the 301BE, 150-2D, 150-1D, and 70-1D specimens, as models 292 UTC, 150-2DUTC, 145 TC, and 70-1DUTC.
Our traceability path for 70-1DUTC is via NIST. Our traceability path for 150-2DUTC, 145TC and 292UTC is via PTB, the German counterpart of NIST. This is equivalent to NIST traceability, based on a mutual recognition agreement for nanoscale measurements among NIST, PTB, and other leading national measurement labs.
| Application | Model | Pattern | Pitch (nm)1 | Material | Mounting | Remarks |
|---|---|---|---|---|---|---|
| AFM, SEM, Auger, Etc. | 70-1D and 70-1DUTC | Parallel ridges | 70 | SiO2 lines on Si | Unmounted, on steel disk, or on an SEM stub (extra charge) | Use contact or tapping mode. Works well in SEM SEI and BEI modes |
| AFM, SEM, Auger, etc. | 150-2D and 150-2DUTC | Array of rounded bumps | 144 | Al bumps on Si | Unmounted, on steel disk, or on an SEM stub (extra charge) | Use contact or tapping mode. Works well in SEM SEI and BEI modes. |
| AFM, SEM, TOF-SIMS, Auger, Surface Potential, other material contrast techniques. SNOM. | 150-1D and 145TC | Parallel ridges | 144 | Al lines on Glass | Unmounted or on steel disk | Use contact or tapping mode. May require a conductive coating for SEM or Auger use. |
| AFM,SEM, TOF-SIMS, Auger, Surface Potential, other material contrast techniques | 301BE and 292UTC | Parallel ridges | 292 | Ti lines on Si | Unmounted, on steel disk, or on an SEM stub (extra charge) | Use contact or TappingMode. Works well in SEM SEI and BEI modes. |
| AFM | 300-2D and 302-edu | Array of Posts | 297 | Al bumps on Si | 15 mm steel disk | Use contact or TappingMode |
| AFM | 700-1D | Parallel ridges | 700 | W-coated Photoresist on Si | 15 mm steel disk | Use contact or TappingMode |
| AFM, SEM, extreme environments | 750-HD | Array of flat bumps | 750 (X), Z (100) | Ni | Unmounted | High Durability: TappingMode, Contact Mode, STM, Liquid, High Temperature |
| AFM, nanomechanics and nanofluidics | 751-HD | Parallel channels | Channels 370 nm wide, 180 nm deep) | Ni | Unmounted | High Durability: TappingMode, Contact Mode, STM, Liquid, High Temperature Not a calibration grating |